Scanning Probe Microscope Automated Range Calculation

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Solution Overview

Problem

In scanning probe microscopes, when the observation target region is wider than the scanning range, users face increased workload due to the need to position and set multiple scanning ranges and movement distances for acquiring multiple pieces of image data, which can lead to inefficiencies and inaccuracies in surface profiling.

Innovation Solution

A scanning probe microscope system with a data processing unit that accepts user input for scanning conditions, including scanning range, spacing between adjacent ranges, and maximum fields of view, and automatically calculates the remaining variable, simplifying the setup process and preventing overlapping particle observations by setting a minimum spacing based on the standard particle size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If multiple scanning ranges are manually positioned and configured to cover a wide observation target region, then the observation coverage is improved, but the user workload and operation complexity increase

Engineering Contradiction:
Improveobservation target region coverageVSAvoiduser workload
Core Design Contradiction:
Area of stationary objectVSEase of operation

Solution Approach 1:

The system automatically calculates and positions multiple scanning ranges based on the observation target region, eliminating the need for manual positioning and configuration by the user. The data processing unit performs self-service by autonomously determining the optimal arrangement of scanning ranges to cover the entire target area.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system pre-calculates the arrangement of multiple scanning ranges before actual scanning begins. By performing preliminary positioning and configuration automatically, the system prepares the optimal scanning plan in advance, reducing operational complexity during the scanning process.

Inventive Principle:
Principle #10Preliminary action

2Area of stationary object

If multiple scanning ranges are arranged to cover a wide observation target region, then the observation coverage is improved, but the positioning precision and setup accuracy become more difficult to maintain

Engineering Contradiction:
Improveobservation target region coverageVSAvoidscanning range positioning accuracy
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The system uses feedback from the observed particle distribution and scanning range overlap detection to automatically adjust and optimize the positioning of scanning ranges. By monitoring whether particles are duplicated across ranges or if gaps exist, the system refines the positioning to achieve accurate and complete coverage.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces manual mechanical positioning with automated computational methods. The data processing unit calculates the optimal positions of scanning ranges using algorithms that consider the observation target region dimensions and particle distribution, substituting manual positioning operations with automated computational positioning.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Area of stationary object

If the scanner moves through multiple scanning ranges to acquire comprehensive image data, then the observation coverage is improved, but the scanning time and productivity efficiency decrease

Engineering Contradiction:
Improveobservation target region coverageVSAvoidscanning efficiency
Core Design Contradiction:
Area of stationary objectVSProductivity

Solution Approach 1:

The system pre-calculates and optimizes the scanning path and sequence before acquiring image data. By determining the most efficient arrangement and order of scanning ranges in advance, the system minimizes unnecessary stage movements and maximizes scanning efficiency during data acquisition.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system dynamically adjusts the scanning range arrangement and acquisition sequence based on the specific characteristics of the observation target region and particle distribution. This dynamic optimization allows the system to adapt the scanning plan to achieve complete coverage with minimal scanning time.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS20240402215A1Scanning probe microscope and program
Publication Date: 2024.12.05 SHIMADZU CORP
  • US20240402215A1 patent drawing
  • US20240402215A1 patent drawing
  • US20240402215A1 patent drawing

AI summary

A scanning probe microscope according to one aspect of the present disclosure divides an observation target region of a sample into a plurality of regions, and drives a scanner to scan the surface of the sample for each region. The data processing unit acquires image data corresponding to the respective regions in the plurality of regions. The input means accepts a user input regarding the acquisition conditions for the plurality of pieces of image data. The acquisition conditions include scanning conditions of the scanner. When the input means accepts a user input for any two variables out of three variables consisting of a scanning range of the scanner for each image data, a spacing between two adjacent scanning ranges, and a maximum number of fields of view capable of being obtained from a maximum scanning range of the scanner, the data processing unit is configured to calculate a remaining one of the three variables based on the accepted two variables.