Scanning Probe Microscope Second Harmonic Feedback Control

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Solution Overview

Problem

Scanning probe microscopes face challenges in maintaining stable imaging over long periods due to variations in excitation efficiency during scanning, which leads to issues like premature separation of the probe from the sample surface, especially when imaging for extended times.

Innovation Solution

Incorporating an integral-multiple amplitude detection system to monitor and adjust the excitation intensity based on integral-multiple component amplitudes, such as the second harmonic amplitude, to maintain consistent contact intensity and amplitude between the probe and the sample, thereby stabilizing the imaging process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the amplitude target value is set slightly smaller than free oscillation amplitude to maintain constant contact intensity, then imaging quality is improved, but excitation efficiency drift causes probe separation from sample surface over time

Engineering Contradiction:
Improveimaging qualityVSAvoidprobe-sample contact stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent implements feedback control by detecting the second harmonic amplitude and using it to adjust the excitation amplitude. The displacement sensor detects cantilever oscillation, and the control unit processes the second harmonic component to generate feedback signals that modify the excitation amplitude, ensuring stable probe-sample contact intensity throughout the imaging process.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes the control parameter from primary resonance amplitude to second harmonic amplitude. By detecting and controlling the second harmonic amplitude (which is sensitive to contact intensity), the system can maintain stable imaging conditions even when excitation efficiency varies, thus resolving the contradiction between imaging quality and contact stability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the excitation amplitude is increased to maintain contact intensity when excitation efficiency decreases, then probe-sample contact is maintained, but the relationship between amplitude and target value varies causing imaging distortion

Engineering Contradiction:
Improveprobe-sample contact maintenanceVSAvoidimaging accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The system continuously monitors the second harmonic amplitude and adjusts the excitation amplitude in real-time based on the detected changes. This feedback mechanism ensures that the probe-sample contact intensity remains constant while automatically compensating for excitation efficiency variations, preventing imaging distortion.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent makes the excitation amplitude dynamic rather than fixed. The control unit continuously adjusts the excitation amplitude based on the detected second harmonic amplitude, allowing the system to adapt to changing excitation efficiency while maintaining stable imaging conditions.

Inventive Principle:
Principle #15Dynamics

3Measurement precision

If conventional amplitude detection methods are used to monitor excitation efficiency, then free oscillation amplitude can be measured, but measurement cannot be performed during actual imaging scan

Engineering Contradiction:
Improveamplitude detection accuracyVSAvoidimaging continuity
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent uses the second harmonic amplitude as an intermediary parameter that serves dual purposes: it provides information about contact intensity (enabling excitation efficiency monitoring) while not interfering with the primary imaging process. This allows continuous measurement during imaging without requiring separate measurement steps.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The second harmonic amplitude detection serves multiple functions simultaneously: it monitors contact intensity, tracks excitation efficiency changes, and provides feedback for amplitude control, all during the imaging process. This multi-functionality eliminates the need for separate measurement procedures.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for stable and continuous imaging over long periods by maintaining constant contact intensity and amplitude, even when excitation efficiency varies, and can be applied to both contact and non-contact atomic force microscopes.

Implementation Method 1

the cantilever is oscillated at a frequency near resonance frequency by oscillating a piezoelectric element

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a displacement sensor for detecting displacement of the cantilever

Methodology Applied
Scientific EffectOptical reflection: Reflection

Data Source

PatentUS7954165B2Scanning probe microscope
Publication Date: 2011.05.31 KANAZAWA UNIV
  • US7954165B2 patent drawing
  • US7954165B2 patent drawing
  • US7954165B2 patent drawing

AI summary

A scanning probe microscope is provided, which can be stably used for a long time even if excitation efficiency varies during scan. A cantilever (5) is excited, and the cantilever (5) and a sample are subjected to relative scanning. A second-harmonic component detection circuit (31) detects second-harmonic component amplitude of oscillation of the cantilever (5) as integral-multiple component amplitude. The second-harmonic component amplitude is amplitude of a second-harmonic component having a frequency twice as high as excitation frequency. An excitation intensity adjustment circuit (33) controls excitation intensity based on the detected second-harmonic component amplitude such that the second-harmonic component amplitude is kept constant.