Scanning Probe Microscope Self-Oscillation Circuit Scan Speed

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Solution Overview

Problem

The step-in scan mode of scanning probe microscopes is limited by the decaying oscillation of the cantilever after lifting off the sample surface, which restricts the scan rate due to the need to wait for the oscillation to decay before starting a new measurement cycle.

Innovation Solution

A self-oscillation circuit arrangement that excites the measuring probe to its natural or resonant frequency after lifting off the sample surface, allowing a new scan cycle to begin once the oscillation reaches a predetermined amplitude, thereby increasing the scan speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the measuring probe is allowed to oscillate freely after lifting off the sample surface, then the natural oscillation can be maintained for measurement, but the scan speed is limited due to the need to wait for oscillation decay

Engineering Contradiction:
Improveoscillation amplitude stabilityVSAvoidscan speed
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The system performs preliminary action by detecting the lift-off event and immediately initiating excitation signals to re-establish the natural oscillation before the next measurement cycle begins. This proactive approach ensures the oscillation is ready in advance, eliminating the waiting period that would otherwise limit scan speed.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system uses feedback by continuously monitoring the oscillation state through detection means and automatically controlling the excitation signals based on the detected oscillation amplitude. When the oscillation decays below a threshold, the system automatically re-excites it, maintaining stable oscillation without manual intervention and enabling faster scanning.

Inventive Principle:
Principle #23Feedback

2Productivity

If the scan cycle time is reduced to increase scan speed, then productivity improves, but the oscillation may not have decayed sufficiently leading to measurement errors

Engineering Contradiction:
Improvescan speedVSAvoidmeasurement accuracy
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The feedback mechanism monitors oscillation amplitude in real-time and provides automatic control signals to maintain oscillation within acceptable measurement ranges. This ensures that even with reduced cycle times, measurements are only performed when oscillation conditions are suitable, preserving accuracy while enabling faster scanning.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system prepares for the next measurement cycle by proactively re-establishing oscillation immediately after lift-off detection. This preliminary action ensures that when the reduced scan cycle time arrives, the oscillation is already at the required amplitude and phase, eliminating the need to wait for decay and ensuring measurement reliability.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables a significant increase in scan speed by quickly re-establishing the natural oscillation of the measuring probe, reducing the time required for each scan cycle and improving the efficiency of the scanning process.

Implementation Method 1

A self-oscillation circuit arrangement that excites the measuring probe to its natural or resonant frequency after lifting off the sample surface

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS11054439B2Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode
Publication Date: 2021.07.06 CARL ZEISS SMT GMBH
  • US11054439B2 patent drawing
  • US11054439B2 patent drawing
  • US11054439B2 patent drawing

AI summary

The present invention relates to a scanning probe microscope having: (a) a scan unit embodied to scan a measuring probe over a sample surface in a step-in scan mode; and (b) a self-oscillation circuit arrangement configured to excite the measuring probe to a natural oscillation during the step-in scan mode.