Scanning Probe Microscope Side View Camera Profile Navigation

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Solution Overview

Problem

Conventional scanning probe microscopes face challenges in safely navigating and analyzing samples with complex shapes, as the highly sensitive probe tips may unintentionally collide with the sample, leading to damage, and existing methods lack precision and are cumbersome.

Innovation Solution

A scanning probe microscope equipped with a side view camera and determining unit to detect and analyze the sample's profile, allowing for precise navigation and avoidance of collision by generating a height map and determining quantitative height values, enabling safe and efficient analysis of complex samples.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a probe is moved close to the sample surface for high-resolution scanning, then measurement precision is improved, but the risk of collision and damage increases

Engineering Contradiction:
Improvescanning precisionVSAvoidcollision risk
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary action by performing a coarse scanning step before the fine scanning step. During this coarse step, the probe is kept at a larger distance from the sample surface, allowing the system to map the overall sample topography and identify high-risk areas. This preliminary mapping enables the subsequent fine scanning to be performed safely with adjusted parameters, reducing collision risk while maintaining measurement precision.

Inventive Principle:
Principle #10Preliminary action

2Ease of operation

If conventional engagement steps are used to position the probe, then the probe can be brought close to the sample, but the process is time-consuming and lacks precision for complex samples

Engineering Contradiction:
Improveprobe positioningVSAvoidengagement time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent segments the probe positioning process into two distinct steps: a coarse engagement step that quickly brings the probe into proximity with the sample, and a fine engagement step that uses the detected profile information to precisely position the probe at the optimal scanning distance. This segmentation eliminates the need for time-consuming manual adjustments and provides automated precision positioning adapted to complex sample geometries.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements feedback by using the side view camera to continuously detect the sample profile and the gap between probe and sample. This real-time information is fed back to the control unit, which automatically adjusts the probe position and scanning parameters. This closed-loop feedback system replaces manual engagement procedures, reducing both time and improving precision for complex samples.

Inventive Principle:
Principle #23Feedback

3Reliability

If manual monitoring and adjustment is performed during engagement, then collision can be avoided, but the process becomes cumbersome and time-consuming

Engineering Contradiction:
Improvecollision avoidanceVSAvoidoperation complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies self-service by enabling the system to automatically monitor and adjust probe positioning without manual intervention. The side view camera continuously detects the sample profile and gap distance, and the control unit automatically processes this information to adjust scanning parameters and probe position. This automation maintains high reliability for collision avoidance while eliminating the operational complexity of manual monitoring and adjustment.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for quick, failure-robust, and precise operation of the scanning probe microscope, enabling accurate analysis of complex samples without damage to the probe or sample, by providing a reliable method for determining the sample's profile and adjusting the probe's position accordingly.

Implementation Method 1

a detection unit which comprises a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentEP3441773B1Characterizing a height profile of a sample by side view imaging
Publication Date: 2022.11.23 ANTON PAAR GMBH
  • EP3441773B1 patent drawingFigure 1
  • EP3441773B1 patent drawingFigure 2~4
  • EP3441773B1 patent drawingFigure 5~6

AI summary

A scanning probe microscope (1), in particular an atomic force microscope, for analysing a sample (6) by moving a probe (11) and the sample (6) relative to one another, wherein the scanning probe microscope (1) comprises a detection unit (60) which comprises a side view camera (90) arranged and configured for detecting an image of the sample (6) in a substantially horizontal side view, and a determining unit (80) for determining information indicative of a profile of at least part of a surface of the sample (6) based on the detected image.