Scanning Probe Microscope Approach Speed Control

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Solution Overview

Problem

Scanning probe microscopes face challenges in reducing measurement time due to uncertainties in setting approach speed and separation distance, which can result in excessive force on the sample surface or incomplete separation, leading to inefficiencies in data acquisition.

Innovation Solution

A scanning probe microscope with a movement driving unit and control device that sets a predetermined approach speed to prevent excessive force and measures adsorptive force to determine an optimal separation distance, ensuring precise control over the interaction between the probe and the sample surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the approach speed is increased to reduce measurement time, then productivity is improved, but the force applied to the sample may exceed safe limits causing damage

Engineering Contradiction:
Improvemeasurement timeVSAvoidforce applied to sample
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The control device monitors the actual approach speed and adjusts it dynamically based on detected conditions. When the probe approaches the sample, the system detects the approach and automatically adjusts the speed to ensure the applied force does not exceed the first force threshold, thereby preventing sample damage while optimizing measurement time.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system changes the approach speed parameter dynamically during the measurement process. Instead of using a fixed high speed that might damage the sample, the speed is adjusted based on real-time detection of the probe-sample interaction, allowing faster approach when safe and slower approach when proximity is detected.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the separation distance is decreased to reduce measurement time, then productivity is improved, but the probe and sample may not separate completely leading to measurement errors

Engineering Contradiction:
Improvemeasurement timeVSAvoidseparation completeness
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The control device uses feedback from adsorptive force measurements to determine the appropriate separation distance. By measuring the adsorptive force between the probe and sample points, the system calculates a separation distance that ensures complete separation while minimizing unnecessary movement time.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system performs preliminary measurement of adsorptive force at sample points before final separation. This preliminary action allows the system to pre-calculate the optimal separation distance needed to overcome the measured adsorptive force, ensuring complete separation without excessive distance.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If wide margins are used in setting approach speed and separation distance to ensure safety, then reliability is improved, but measurement time increases

Engineering Contradiction:
Improveoperation safetyVSAvoidmeasurement time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system replaces conservative fixed-margin settings with dynamic feedback-based control. The control device continuously monitors probe position, approach speed, and adsorptive force, adjusting parameters in real-time to maintain safety while eliminating unnecessary time margins.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system performs self-adjustment of operational parameters based on real-time measurements. By automatically measuring adsorptive force and calculating optimal separation distances, the system eliminates the need for conservative manual setting margins while ensuring safe and efficient operation.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for a reduction in measurement time while maintaining control over the forces applied, ensuring accurate data acquisition without damaging the sample surface.

Implementation Method 1

the control device directly or indirectly measures an adsorptive force between the probe and at least one point on the surface

Methodology Applied
Scientific EffectAdsorptive force: Adsorption

Data Source

PatentUS11391755B2Scanning probe microscope and setting method thereof
Publication Date: 2022.07.19 HITACHI HIGH TECH ANALYSIS CORP
  • US11391755B2 patent drawing
  • US11391755B2 patent drawing
  • US11391755B2 patent drawing

AI summary

Provided are a scanning probe microscope and a setting method thereof that contribute to a reduction in the time taken for measuring. The scanning probe microscope includes: a movement driving unit capable of moving a cantilever and a sample relatively in at least a z direction; and a control device operating an approach operation of making the cantilever and the sample approach to each other at a predetermined speed by controlling the movement driving unit, and stopping the approach operation when it is determined that the probe and the sample are in contact with each other, wherein the predetermined speed is set such that when the control for stopping the approach operation is performed, force applied to the sample due to contact between the probe and the sample does not exceed a preset first force.