SPM Tip Array Substrates with Etched Pedestals for Faster Measurements
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Solution Overview
Problem
Existing SPM configurations require frequent tip replacements and complex operations for switching between different types of probes, which is time-consuming and inefficient, especially for large-scale applications like semiconductor fabrication.
Innovation Solution
A method for producing a substrate with a plurality of nano-sized tips arranged in a regular array, using a mask to etch the substrate and create pedestals with integrated tips, allowing for high-density tip arrays suitable for SPM measurements without manual replacements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional cantilever-based tips are used in SPM measurements, then the measurement function is achieved, but frequent tip replacements are required which increases time loss and reduces productivity
Solution Approach 1:
The invention divides the tip function into multiple independent tips arranged in an array on a substrate. Instead of using a single cantilever-based tip that must be replaced, the system uses an array of tips where individual tips can be replaced or the entire substrate can be reused for multiple measurement types. This segmentation allows parallel measurements and eliminates frequent replacements, directly addressing the time loss issue.
Solution Approach 2:
The tip substrate is designed to support multiple types of SPM measurements on the same substrate. The substrate can be used for different measurement types (contact-based, non-contact, electrical, magnetic) by simply changing the sample or measurement parameters, not replacing the entire probe. This multi-functionality eliminates the need for frequent probe exchanges and relocates regions of interest, significantly improving productivity.
2Adaptability or versatility
If different types of probes are exchanged for different SPM measurements, then measurement versatility is achieved, but the operation becomes complex and time-consuming
Solution Approach 1:
The tip substrate serves as a universal platform that can perform multiple types of SPM measurements including contact-based mode, intermittent contact mode, and contactless mode. The same substrate with its array of tips can be used for electrical measurements, magnetic measurements, and topographical imaging by simply changing the measurement parameters and sample configuration, not the physical probe. This eliminates the complexity of exchanging different probe types.
Solution Approach 2:
Instead of having a single probe that must be exchanged to perform different measurements, the invention inverts the approach by having a fixed substrate with multiple tips that remains stationary while the sample or measurement configuration changes. This inversion simplifies the system by making the probe permanent and adaptable rather than requiring multiple specialized probes.
3Quantity of substance
If existing tip fabrication methods are used, then tips can be produced, but the number of tips is limited which prevents industrial-scale applications
Solution Approach 1:
The invention merges multiple individual tip fabrication processes into a single batch process. Instead of fabricating tips one by one or in small groups using conventional cantilever methods, the invention uses a substrate-based approach where thousands of tips are formed simultaneously in parallel on a single substrate. This merging of fabrication processes enables industrial-scale production while maintaining tip quality and functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the fabrication of substrates with thousands or millions of SPM tips, facilitating rapid and efficient SPM measurements on an industrial scale by eliminating the need for physical tip replacements and enabling multiple types of SPM measurements on a single substrate.
Implementation Method 1
the substrate is subjected to an etching process relative to the mask portions
Data Source
Figure 1a~1b
Figure 2a~2b
Figure 3a~3b
AI summary
One aspect of the invention is related to a method for producing a substrate comprising a plurality of tips suitable to be used in scanning probe microscopy (SPM), wherein as a first step, a substrate (1) is produced or provided comprising a plurality of nano-sized tips (2), preferably arranged in a regular array and spaced apart by nano-sized interspacings. A mask is applied to this substrate, comprising multiple mask portions (5), wherein each mask portion covers at least one tip (2), whereafter the substrate is subjected to an etching process relative to the mask portions. After the removal of the mask portions, the method results in the creation of a substrate comprising multiple pedestals (6) having each at least one nanotip (2) on the upper surface thereof and spaced apart at a distance suitable for performing an SPM measurement of a given type. In a second aspect, the invention is also related to the use of a substrate comprising a plurality of nanotips (2) not located on top of respective pedestals, in an SPM measurement performed on a sample (10) of suitably small dimensions.