Scanning Probe Microscope Transition Detection and Re-Scan

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Solution Overview

Problem

Scanning probe microscopes, particularly atomic force microscopes (AFMs), face challenges in accurately imaging transition regions such as sidewalls of semiconductor features at high speeds due to inertia issues, leading to 'notching' artifacts where data is either missing or biased, which compromises measurement accuracy and throughput.

Innovation Solution

A method that automatically detects transition regions by analyzing slope changes during scanning, re-scans the region with modified parameters to ensure accurate data capture, and amends original scan data with re-scan data to eliminate notching, allowing for high-speed imaging without data loss or bias.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If high-speed scanning is used to increase productivity, then scanning speed improves, but measurement precision deteriorates due to inertia causing notching artifacts in transition regions

Engineering Contradiction:

Improvescanning speedVSAvoidmeasurement accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The system performs preliminary detection during the initial high-speed scan to identify transition regions, then proactively re-scans these regions with modified parameters before finalizing the measurement data, preventing notching artifacts from compromising overall measurement accuracy

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The scanning system dynamically adjusts its operation by switching between high-speed scanning mode for general areas and low-speed re-scan mode for detected transition regions, optimizing both productivity and measurement precision through adaptive parameter modification

Inventive Principle:

Principle #15Dynamics

2Measurement precision

If re-scanning transition regions is performed to improve measurement precision, then measurement accuracy improves, but loss of time increases due to additional scanning operations

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidscanning time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

Instead of re-scanning the entire sample area, the system applies localized re-scanning only to specific transition regions that are automatically detected during the initial scan, concentrating measurement resources where they are most needed while preserving overall scanning efficiency

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The system performs partial re-scanning of only the necessary transition regions rather than complete re-scanning of the entire sample, using just enough additional scanning time to correct measurement accuracy in critical areas without excessive time investment

Inventive Principle:

Principle #16Partial or excessive action

Data Source

PatentUS7770439B2Method and apparatus of scanning a sample using a scanning probe microscope

Publication Date: 2010.08.10 BRUKER NANO INC

AI summary

A method and apparatus of scanning a sample with a scanning probe microscope including scanning a surface of the sample according to at least one scan parameter to obtain data corresponding to the surface, and substantially automatically identifying a transition in the surface. Based on the identified transition, the sample is re-scanned. Preferably, the resultant data is amended with data obtained by re-scanning the transition.