Scanning Probe Microscope Zero Contact Force Measurement
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Solution Overview
Problem
Scanning probe microscopes face challenges in accurately measuring steep sloped surfaces and soft materials due to probe sliding and sample deformation, leading to measurement errors.
Innovation Solution
A method involving repeated approximation and retraction of the probe at multiple sampling positions, with zero contact force detection using a contact force detection sensor to minimize errors caused by sliding and deformation, allowing for highly accurate three-dimensional profile measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the probe is driven toward the sample until the contact force reaches a constant value, then the measurement can be performed on steep sloped surfaces, but the minute contact force causes slight deformation of the sample or sliding of the probe
Solution Approach 1:
The patent applies partial action by driving the probe toward the sample only until the contact force reaches zero, rather than continuing to a constant positive contact force. This partial application of the approximation action eliminates harmful deformation and sliding while still enabling measurement on steep sloped surfaces. The key is stopping the approximation process at the precise moment when contact force becomes zero, avoiding excessive compression that would cause the harmful effects.
Solution Approach 2:
The patent uses feedback control by continuously monitoring the contact force between the probe and sample during the approximation process. The system detects when the contact force reaches zero and automatically stops the probe's approach at that precise moment. This feedback mechanism ensures that the probe makes contact without applying compressive force, thereby preventing sample deformation and probe sliding while maintaining measurement capability on difficult surfaces.
2Object-affected harmful factors
If the probe is not driven until constant contact force is reached, then sample deformation and probe sliding are avoided, but measurement accuracy on steep sloped surfaces deteriorates
Solution Approach 1:
The patent applies partial action by driving the probe toward the sample only until the contact force reaches zero, rather than continuing to a constant positive contact force. This partial application of the approximation action eliminates harmful deformation and sliding while still enabling measurement on steep sloped surfaces. The key is stopping the approximation process at the precise moment when contact force becomes zero, avoiding excessive compression that would cause the harmful effects.
Solution Approach 2:
The patent uses feedback control by continuously monitoring the contact force between the probe and sample during the approximation process. The system detects when the contact force reaches zero and automatically stops the probe's approach at that precise moment. This feedback mechanism ensures that the probe makes contact without applying compressive force, thereby preventing sample deformation and probe sliding while maintaining measurement capability on difficult surfaces.
3Measurement precision
If the probe contacts the sample with force to obtain height data, then measurement can be performed, but the contact force causes deformation of soft materials and hard materials show different deformation quantities
Solution Approach 1:
The patent applies partial action by driving the probe toward the sample only until the contact force reaches zero, rather than continuing to a constant positive contact force. This partial application of the approximation action eliminates harmful deformation and sliding while still enabling measurement on steep sloped surfaces. The key is stopping the approximation process at the precise moment when contact force becomes zero, avoiding excessive compression that would cause the harmful effects.
Solution Approach 2:
The patent uses feedback control by continuously monitoring the contact force between the probe and sample during the approximation process. The system detects when the contact force reaches zero and automatically stops the probe's approach at that precise moment. This feedback mechanism ensures that the probe makes contact without applying compressive force, thereby preventing sample deformation and probe sliding while maintaining measurement capability on difficult surfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of samples with high aspect ratios without damaging them, reducing errors associated with probe sliding and sample deformation, thereby improving measurement accuracy.
Implementation Method 1
the height of the probe at the moment when the probe contacts the sample with zero contact force is obtained by analyzing the signal from a contact force detection sensor
Data Source
AI summary
The invention provides a scanning probe microscope capable of performing highly accurate three-dimensional profile measurement in a state in which no sliding of the probe or deformation of the sample substantially occurs. The present invention realizes a highly accurate three-dimensional profile measurement using a scanning probe microscope, in which the method performs measurement to obtain an accurate three-dimensional profile without causing damage to the sample by having the probe contact the sample at the measurement point and then move to a next measurement point, wherein the probe is pulled up and retracted temporarily and then moved to the next measurement point where it is approximated to the sample again, the method comprises analyzing the signals of the contact force sensor so as to obtain the height of the probe at the time when the probe contacts the sample with zero contact force, so as to substantially eliminate errors caused by sliding of the probe and deformation of the sample caused by minute contact force.