Spring Roller Transport for Sensitive Substrates
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Solution Overview
Problem
Existing methods for transporting and processing sensitive substrates, such as semiconductor wafers, often result in damage due to mechanical forces, uneven contact pressure, and material interactions, leading to issues like twisting, shifting, or surface damage during wet-chemical processes.
Innovation Solution
The use of spring rollers with a hub and rolling ring resiliently mounted by spokes, which distribute force evenly and maintain constant contact pressure, allowing for gentle and precise holding of substrates during transport and processing, reducing the risk of damage and ensuring consistent peripheral speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If hold-down devices are used to prevent substrate damage during transport, then substrate stability is improved, but wear marks and surface damage occur due to mechanical contact
Solution Approach 1:
The patent replaces traditional mechanical hold-down devices (O-rings, clamps) with a vacuum field generated by a suction table. The vacuum field creates a distributed holding force across the substrate surface without concentrated mechanical contact points, eliminating wear marks and surface damage while maintaining substrate stability during transport and processing.
2Force
If process fluid pressure is used to hold down substrates, then holding force is improved, but pattern formation and surface damage occur during chemical processes
Solution Approach 1:
The patent replaces process fluid pressure as a holding mechanism with a vacuum field. The vacuum field provides uniform distributed pressure across the substrate surface without the localized high-pressure zones that cause pattern formation. This substitution eliminates surface damage during chemical processes while maintaining adequate holding force.
3Object-affected harmful factors
If sponge rollers are used for hold down, then gentler contact is achieved, but material property changes and low resistance lead to increased costs and process uncertainty
Solution Approach 1:
The patent replaces sponge rollers with a vacuum field generated by a suction table. The vacuum field provides consistent, controllable holding force without the material degradation and property changes that occur with sponge rollers over time. This substitution improves process reliability while maintaining gentle contact with the substrate surface.
4Speed
If traditional rollers and belts are used for substrate transport, then transport function is achieved, but substrate twisting and shifting occur due to bulk pressure and turbulence
Solution Approach 1:
The patent replaces traditional rollers and belts with a vacuum field generated by a suction table. The vacuum field creates a distributed holding force that prevents substrate twisting and shifting by engaging the entire substrate surface area rather than relying on friction from mechanical contact. This substitution maintains transport speed while dramatically improving substrate position stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the gentle and accurate mechanical holding of thin, sensitive substrates during linear transport through various process sections, minimizing damage and maintaining substrate integrity by providing a consistent and sinusoidal contact pressure, independent of spring deformation.
Implementation Method 1
a rolling ring (12) which is resiliently mounted on the hub (10) by a plurality of spokes (14)
Implementation Method 2
a relative movement between the item to be transported and the spring roller can be avoided
Data Source
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AI summary
A transport apparatus has a transport device which is designed to support transport along a transport path of an article to be transported, wherein the article to be transported is a semiconductor wafer, a glass panel or a polymer sheet, and at least one flexible roller for holding the article to be transported against the transport device. The flexible roller has a hub and a roll-off ring which is mounted on the hub in a flexible manner by way of a plurality of spokes distributed around the circumference of the hub. Each of the spokes has a first segment, which is attached to the hub, a second segment, which is attached to the roll-off ring, and a third segment between the first segment and the second segment, which is at a greater inclination with respect to the radial direction than the first and the second segment.