Spring-Loaded Sample Holder for Stable Ion Milling Contact
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Solution Overview
Problem
In ion milling, insufficient adhesion between the shield plate and the sample leads to thermal damage, redeposition, and changes in the protrusion amount due to cooling-induced shape changes, especially in heat-sensitive materials, which affects the accuracy of charged particle beam devices like ion milling and scanning electron microscopes.
Innovation Solution
A sample holder design featuring a shield plate integrated with a sample stand and elastic springs to ensure stable adhesion and adjust the protrusion amount, using a pressing member and springs to maintain contact and accommodate shape changes during cooling, while being mounted on a protrusion amount adjustment jig for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the shield plate is pressed against the sample using a screw to ensure adhesion, then the adhesion between shield plate and sample is improved, but the sample holder structure becomes more complex and the protrusion amount adjustment becomes difficult
Solution Approach 1:
The patent employs a spring-loaded pressing member that dynamically adjusts to maintain contact between the shield plate and sample. The elastic body automatically compensates for thermal contraction and shape changes during cooling, ensuring continuous adhesion without requiring complex fixed mechanical structures or adjustment mechanisms.
Solution Approach 2:
The pressing member's elastic properties allow it to change its pressing force parameter in response to temperature changes. As the sample and shield plate cool and contract, the spring compresses to maintain optimal contact pressure, automatically adapting to thermal effects without structural modification.
2Temperature
If the mask retainer is formed of phosphor bronze with high thermal conductivity to transmit coldness, then the cooling efficiency is improved, but the mask retainer contracts and warps due to large contraction, causing insufficient adhesion
Solution Approach 1:
The patent separates the cooling function from the pressing function. The mask retainer is dedicated to cooling with high thermal conductivity, while the pressing function is assigned to a separate spring-loaded pressing member. This segmentation allows each component to optimize its function without the conflicting requirements that cause warping and adhesion loss.
Solution Approach 2:
The elastic body acts as an intermediary between the cooling structure and the shield plate. It absorbs the dimensional changes and warping of the mask retainer during cooling, while still transmitting the necessary pressing force to maintain adhesion between the shield plate and sample.
3Productivity
If the ion beam current and acceleration voltage are increased to reduce processing time, then the productivity is improved, but the temperature rise of the sample increases causing thermal damage
Solution Approach 1:
The patent implements continuous cooling during the ion milling process through the mask retainer connected to liquid nitrogen. This allows the ion beam to operate at high current and voltage for rapid processing while the cooling system continuously removes heat, preventing thermal damage even during extended high-power operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances adhesion between the shield plate and the sample, preventing thermal damage and redeposition, and allows for precise adjustment of the protrusion amount, improving the accuracy and reliability of charged particle beam devices by maintaining consistent contact and shape stability during processing.
Implementation Method 1
a sample holder (1) includes... an elastic body (6)... connected to the sample supporting member (4) and the sample stand (7)
Implementation Method 2
When the sample is cooled and the heat of the sample is dissipated through the shield plate
Implementation Method 3
it is necessary to cool the shield plate and the sample
Implementation Method 4
By flicking atoms from the upper surface of the sample using a physical sputtering phenomenon, a milling surface with a shape along the end face of the shield plate can be obtained
Data Source
AI summary
A performance of a sample holder 1 used in a charged particle beam device is improved. A shield plate 2 is connected to a sample stand 7. A sample stand 7 is provided with a pressing member 5 that can move in a direction perpendicular to the shield plate 2 in a state in which the pressing member is attached to the sample stand 7, and has a bar shape. A sample supporting member 4 connected to the pressing member 5 is provided at a position facing the shield plate 2. A spring 6 is provided along an outer circumference of the pressing member 5 and is connected to the sample supporting member 4 and the sample stand 7.