Thin Film Sputtered Six-Dimensional Force Sensor
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current multi-dimensional force sensors face issues with low temperature range stability and performance degradation due to glue volatilization and condensation, limiting their effectiveness in complex systems like aerospace applications.
Innovation Solution
A high-precision six-dimensional force sensor structure incorporating a cross beam, double U-shaped beam, base, top cover, bottom cover, and thin film strain gauges, where 24 strain gauges are sputtered to form Wheatstone bridges, reducing inter-dimensional coupling and enhancing sensitivity and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional strain gauges are pasted using glue, then the sensor can be manufactured easily, but the temperature range is limited and performance degrades due to glue volatilization and condensation
Solution Approach 1:
The patent replaces the conventional mechanical pasting method (using glue to attach strain gauges) with a sputtering process. The strain gauges are directly deposited as thin films onto the beam structure through physical vapor deposition, eliminating the need for adhesive materials. This substitution resolves the contradiction by removing the glue that causes temperature-related performance degradation while maintaining manufacturability through a standardized thin film deposition process.
Solution Approach 2:
The patent changes the manufacturing parameter from room-temperature gluing to high-temperature sputtering deposition followed by low-temperature operation. The strain gauges are deposited in a vacuum environment at elevated temperatures, creating a stable thin film structure that can operate reliably across a wide temperature range without the volatilization and condensation issues that plague adhesive-based systems.
2Adaptability or versatility
If a cross beam structure with multiple beams is used, then six-dimensional force measurement is enabled, but inter-dimensional coupling increases
Solution Approach 1:
The patent divides the measurement function into separate independent components by creating distinct beam structures for different measurement dimensions. The cross beam is segmented into multiple independent beams (first beam for Fx/Mz, second beam for Fy/Mx, third beam for Fz/My), where each beam independently measures specific force and moment components. This segmentation reduces inter-dimensional coupling by isolating the deformation paths for different measurement channels.
Solution Approach 2:
The patent applies different structural characteristics to different parts of the sensor system. Each beam is designed with specific local geometric properties (different lengths, thicknesses, and positioning) optimized for its particular measurement function. The strain gauge arrangements are also locally optimized on each beam to maximize sensitivity to the target dimension while minimizing cross-sensitivity to other dimensions, thereby reducing inter-dimensional coupling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved stability, sensitivity, and accuracy by minimizing inter-dimensional coupling errors and simplifying the structure, while allowing for precise measurement of forces and moments across multiple dimensions.
Implementation Method 1
thin film strain gauges... converts deformation of the sensor under stress into a voltage change
Implementation Method 2
sputter thin film strain gauges through the sputtering process
Data Source
AI summary
A combined structure for thin film sputtering high-precision six-dimensional force sensor includes a cross beam, a double U-shaped beam, a base, a top cover, a bottom cover and thin film strain gauges. Strain gauges are sputtered on the main beam to form six sets of Wheatstone bridges, with three sets on the cross beam and three sets on the double U-shaped beam. The measurement method of the six-dimensional force sensor is that: an input force/moment of a certain dimension acts on the center of the cross beam and the center of the double U-shaped beam, so that the sensor is deformed and resistance values of strain gauges at corresponding positions change, thereby changing output voltages of corresponding bridges.