Sputtered TiO2 Electron Transport Layer for Flexible Perovskite Solar Cells

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Solution Overview

Problem

Conventional methods for forming mesoporous layers in perovskite solar cells, such as spin coating and spray pyrolysis, require high temperatures and are not suitable for flexible devices, leading to high energy consumption and limited applicability.

Innovation Solution

A method involving sputtering a compact titanium dioxide layer with a thickness of 20-120 nm and a roughened titanium dioxide layer with a thickness of 20-30 nm is used to form an electron transporting layer, enhancing electron transport efficiency without the need for high-temperature annealing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If spin coating or spray pyrolysis is used to form the mesoporous layer, then the contact area between the electron transporting layer and perovskite layer is increased, but the annealing temperature must be higher than 450° C. leading to high energy consumption and unsuitability for flexible devices

Engineering Contradiction:
Improvecontact area between electron transporting layer and perovskite layerVSAvoidannealing temperature
Core Design Contradiction:
Area of stationary objectVSUse of energy by stationary object

Solution Approach 1:

The patent changes the formation method of the electron transporting layer from solution-based (spin coating/spray pyrolysis) to physical vapor deposition (sputtering). This parameter change allows the layer to be formed at low temperatures (below 450° C.) while maintaining the desired mesoporous structure and large contact area with the perovskite layer, thus resolving the contradiction between contact area and annealing temperature

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the chemical/solution-based formation process (spin coating, spray pyrolysis) with a physical sputtering process. This substitution eliminates the need for high-temperature annealing while still achieving the mesoporous structure that provides large contact area, thereby solving the technical contradiction

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Shape

If spin coating or spray pyrolysis is used to form the mesoporous layer, then the mesoporous structure can be achieved, but the energy consumption increases due to high-temperature annealing

Engineering Contradiction:
Improvemesoporous structureVSAvoidenergy consumption
Core Design Contradiction:
ShapeVSUse of energy by moving object

Solution Approach 1:

The patent replaces the thermal/chemical process (spin coating followed by high-temperature annealing) with a physical sputtering process. This substitution enables formation of the mesoporous structure at low temperatures, significantly reducing energy consumption while maintaining the desired mesoporous morphology

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the processing temperature parameter from high (above 450° C.) to low (below 450° C.) by adopting sputtering technology. This parameter change allows achievement of the mesoporous structure with reduced energy consumption, resolving the contradiction between structure formation and energy usage

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method improves electron transmission efficiency and carrier collection ability in perovskite solar cells, making them suitable for flexible devices with reduced energy consumption.

Implementation Method 1

sputtering a compact layer onto a light transmitting electrode; sputtering a roughened layer onto the compact layer

Methodology Applied
Scientific EffectSputtering: Sputtering

Implementation Method 2

The perovskite solar cell has a high light absorption efficiency, such that photons can be quickly separated into electrons and electron holes

Methodology Applied
Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Data Source

PatentUS12532651B2Perovskite solar cell and method for manufacturing the same
Publication Date: 2026.01.20 NATIONAL TSING HUA UNIVERSITY
  • US12532651B2 patent drawing
  • US12532651B2 patent drawing
  • US12532651B2 patent drawing

AI summary

A perovskite solar cell and a method for manufacturing the same are provided. The method includes: sputtering a compact layer onto a light transmitting electrode, in which the compact layer has a thickness ranging from 20 nm to 120 nm, and a material of the compact layer is titanium dioxide; sputtering a roughened layer onto the compact layer, in which the roughened layer has a thickness ranging from 20 nm to 30 nm, and a material of the roughened layer is titanium dioxide; disposing a perovskite layer onto the roughened layer; disposing a hole transporting layer onto the perovskite layer; and disposing a back electrode onto the hole transporting layer.