Sputtering Container Asymmetric Fixing and Titanium Material

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Sputtering apparatuses cause contamination and damage to containers due to target material adherence and high-temperature plasma-induced expansion, leading to frequent replacement and handling issues.

Innovation Solution

A sputtering apparatus design with differently sized and threaded container fixing holes allows for varying attachment tightness, and the use of a damage-resistant material like titanium for the container, enabling expansion without damage and reducing contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the container is tightly fixed to the plate, then the container is stable and secure, but the container is damaged due to thermal expansion from high-temperature plasma

Engineering Contradiction:

Improvecontainer stabilityVSAvoidcontainer integrity

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The fixing holes are designed with asymmetric threading: one side has a threaded hole that allows tight fixing, while the other side has a non-threaded hole that allows loose fixing. This dynamic configuration enables the container to be securely held while accommodating thermal expansion movements, resolving the contradiction between stability and integrity.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

Different local qualities are applied to different sides of the container through asymmetric fixing hole design. One side provides strong mechanical attachment (threaded hole) for stability, while the other side provides flexible attachment (non-threaded hole) for expansion accommodation, allowing each side to serve its specific function.

Inventive Principle:

Principle #3Local quality

2Stability of the object's composition

If the container is made of quartz or pyrex, then the container can maintain uniform temperature, but the container is susceptible to damage from outside pressures and thermal expansion

Engineering Contradiction:

Improvetemperature uniformityVSAvoidpressure resistance

Core Design Contradiction:

Stability of the object's compositionVSStrength

Solution Approach 1:

The material parameter is changed from traditional quartz/pyrex to titanium. Titanium maintains the required thermal properties for uniform temperature distribution while providing superior mechanical strength and pressure resistance, eliminating the vulnerability to damage while preserving temperature stability.

Inventive Principle:

Principle #35Parameter changes

3Manufacturing precision

If the container is replaced frequently to prevent contamination, then the substrate is protected from impurities, but the handling process increases damage risk and reduces productivity

Engineering Contradiction:

Improvesubstrate purityVSAvoidmanufacturing efficiency

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The asymmetric fixing hole design is implemented as a preliminary preventive measure to accommodate thermal expansion before damage occurs. This prevents container damage and contamination in advance, eliminating the need for frequent replacements and maintaining high productivity while ensuring substrate purity.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The thermal expansion, which was previously a harmful cause of container damage, is converted into a beneficial feature by providing expansion space through the non-threaded fixing hole. This allows the container to expand freely during plasma generation without damage, preventing contamination and reducing replacement frequency.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design prevents container damage and contamination by allowing thermal expansion and using titanium for enhanced durability and heat conductivity, improving manufacturing yields and reducing handling risks.

Implementation Method 1

the container is easily damaged from heat expansion

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

using titanium for enhanced durability and heat conductivity

Methodology Applied

Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 3

plasma is generated by applying a high voltage

Methodology Applied

Scientific EffectPlasma generation: Plasma

Implementation Method 4

ionic Ar+ ions collide with the target 115, and particles separated from the target 115 are deposited on the substrate 107

Methodology Applied

Scientific EffectIon collision: Ion Beam

Data Source

PatentUS7820016B2Sputtering apparatus and method of preventing damage thereof

Publication Date: 2010.10.26 LG DISPLAY CO LTD

AI summary

A sputtering apparatus includes a container; a plate for supporting the container; a first attachment for attaching the container to the plate; and a second attachment for less tightly attaching the container to the plate than through the first attachment.