Sputtering Gap Measurement Using Horizontal Testing Platform
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current methods for measuring and adjusting the sputtering gap in magnetron sputtering devices, such as using feeler gauges, suffer from instability, curvature issues leading to inaccurate measurements, limited measurement range, and variability among users, resulting in increased costs and inconsistent results.
Innovation Solution
A sputtering gap measurement apparatus that includes a horizontal testing platform and a distance measurement mechanism, allowing for accurate measurement of the gap between a support table and a floating mask without a feeler gauge, using a scale and movement mechanisms to ensure stability and extend the measurement range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a feeler gauge is used to measure the sputtering gap, then the measurement can be performed with simple equipment, but the measurement stability is insufficient due to protrusions at the periphery of the quartz plate affecting the level degree
Solution Approach 1:
A horizontal testing platform is introduced as an intermediary component between the feeler gauge and the quartz plate. This platform provides a stable, flat reference surface that is not affected by peripheral protrusions, allowing the feeler gauge to measure accurately while maintaining the simplicity of the overall measurement system.
Solution Approach 2:
Instead of directly measuring the gap at the original location affected by protrusions, the measurement is copied to a different location using the horizontal testing platform. The platform creates a reference surface that replicates the necessary measurement conditions without the harmful effects of peripheral irregularities.
2Device complexity
If a feeler gauge is used for long-term measurement, then the equipment remains simple, but the feeler gauge may become curved leading to erroneous measurement results
Solution Approach 1:
The horizontal testing platform serves as a stable intermediary that does not deform over time. By placing the feeler gauge on this rigid platform rather than directly on the quartz plate, the system separates the measurement function from the components subject to deformation, ensuring long-term reliability while keeping the feeler gauge itself simple.
Solution Approach 2:
The horizontal testing platform is designed with sufficient rigidity and stability to prevent deformation before it can affect measurements. This pre-engineered stable base cushions against the potential curvature issues that would otherwise develop in long-term use of simple feeler gauges.
3Adaptability or versatility
If the measurement range needs to be extended to modify gap values A and B, then the measurement capability can be improved, but a new feeler gauge must be provided increasing manufacture cost
Solution Approach 1:
The horizontal testing platform is designed with movable or adjustable components that allow the measurement range to be dynamically extended. Instead of requiring multiple fixed feeler gauges for different gap values, the platform can be repositioned or reconfigured to accommodate different measurement ranges, reducing manufacturing costs while improving adaptability.
Solution Approach 2:
The horizontal testing platform is designed as a universal measurement base that can accommodate multiple feeler gauges of different lengths or can be repositioned to measure various gap values. This multi-functional design eliminates the need to manufacture separate specialized gauges for each gap value, reducing costs while extending measurement capability.
4Ease of operation
If different test personnel use the feeler gauge, then the measurement process remains simple, but the measurement results differ greatly indicating poor repeatability
Solution Approach 1:
The horizontal testing platform provides a common reference surface at a consistent elevation for all operators. This equipotential base ensures that regardless of which personnel performs the measurement, they are all measuring from the same stable reference plane, eliminating variations caused by different operators holding or positioning the feeler gauge differently.
Solution Approach 2:
The horizontal testing platform is designed to self-align or provide inherent guidance features that automatically ensure proper positioning of the feeler gauge. This self-guiding mechanism reduces the skill level required for operation while maintaining high repeatability, as the platform itself enforces correct measurement geometry rather than relying on operator expertise.
Data Source
AI summary
A magnetron sputtering device in one embodiment of the present disclosure includes a support table supporting thereon a base substrate, and a floating mask arranged at a first side of the support table and substantially parallel to the support table. The sputtering gap measurement apparatus includes: a horizontal testing platform arranged on the support table during the measurement, a first edge of the horizontal testing platform being flush with an edge of the first side of the support table in the case that the horizontal testing platform is located at a first position; a first movement mechanism configured to control the horizontal testing platform to move in a direction close to the floating mask, the horizontal testing platform being in contact with the floating mask in the case that the horizontal testing platform has moved to a second position; and a distance measurement mechanism configured to measure a movement distance of the horizontal testing platform from the first position to the second position.