Detachable Sputtering Slit Plate Inner Member
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Solution Overview
Problem
Existing sputtering devices face challenges in easily changing the shape of the opening, which affects the deposition properties and in-plane uniformity of films on substrates.
Innovation Solution
A sputtering device with a slit plate configuration that includes an inner member with a penetrating opening and an outer member, allowing for easy attachment and detachment, forming a labyrinth structure to prevent particle movement and thermal expansion issues, and gas supply units for efficient gas distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the opening shape is changed to improve film deposition uniformity, then the film quality is improved, but the device complexity increases due to the need for multiple slit plate configurations
Solution Approach 1:
The slit plate is divided into an inner member with the opening and an outer member that can be attached and detached. This segmentation allows the opening shape to be easily changed by replacing only the inner member, improving film deposition uniformity without increasing overall device complexity.
Solution Approach 2:
The slit plate configuration is made dynamic through the attachable and detachable inner member, allowing the opening shape to be adjusted according to different processing requirements. This enables optimization of film deposition uniformity for different substrates without permanent structural modifications.
2Device complexity
If a fixed slit plate structure is used to maintain device simplicity, then the device complexity is reduced, but the ability to adapt to different opening shapes is limited
Solution Approach 1:
By segmenting the slit plate into removable inner and outer members, the system maintains simplicity when a single configuration is needed while enabling easy adaptation to different opening shapes by swapping the inner member, thus resolving the contradiction between simplicity and versatility.
Solution Approach 2:
The outer member serves as a universal component that can accommodate different inner members with various opening shapes. This multi-functionality allows a single basic structure to adapt to different processing requirements, maintaining device simplicity while enhancing versatility.
3Ease of operation
If the inner member is made detachable from the outer member to enable easy opening shape changes, then the ease of operation is improved, but the potential for particle scattering and adhesion increases
Solution Approach 1:
The detachable design segments the slit plate into replaceable components, enabling easy opening shape changes. The segmentation itself is managed through proper sealing and fitting mechanisms that prevent particle scattering and adhesion during operation.
Solution Approach 2:
The potential harm of particle scattering from the detachable interface is converted into a benefit through proper sealing design. The detachability allows for precise manufacturing and sealing of the opening shape, while the sealing mechanism itself prevents particle contamination, turning the potential weakness into a strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances film deposition uniformity and productivity by allowing easy adjustment of the opening shape, suppressing particle scattering and adhesion, and promoting efficient gas supply to the substrate.
Implementation Method 1
a sputtering device for forming a film by allowing particles emitted from a target member to be incident on a substrate
Data Source
AI summary
A sputtering device includes a processing chamber where a substrate is accommodated, and a slit plate that partitions the processing chamber into a first space where a target member is disposed and a second space where the substrate is disposed. The slit plate includes an inner member having an opening that penetrates therethrough in a thickness direction of the slit plate, and an outer member disposed around the inner member. The inner member is attachable to and detachable from the outer member.