Sputtering Target Transport Box with Wheels and Segmented Cushioning
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Solution Overview
Problem
The challenge lies in safely and easily transporting large, heavy, and often brittle sputtering targets used in semiconductor manufacturing without causing damage, as existing methods either result in breakage during transport or hinder the process due to increased weight and complexity.
Innovation Solution
A sputtering target transport box equipped with supports on the bottom plate and wheels on the edge, allowing for mechanical and man-powered transport, with cushioning materials for impact protection and a double-box structure for added stability and ease of handling, featuring a handle for inclined transport and a conductive coating to prevent electrification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the transport box is designed to securely hold the sputtering target to prevent damage, then the target protection is improved, but the opening and transport become troublesome due to increased weight and complexity
Solution Approach 1:
The transport box is divided into an outer box and an inner box that can be independently separated. The inner box containing the sputtering target can be independently removed from the outer box, allowing easy access and transport while maintaining secure protection during transit.
Solution Approach 2:
The transport box incorporates wheels on the bottom plate to enable mobile transport. This dynamic element allows the box to be easily moved without manual lifting, reducing the effort required despite the weight of the protected target.
2Reliability
If heavy-duty protection structures are added to prevent target breakage, then the target safety is improved, but the device weight and complexity increase
Solution Approach 1:
Cushioning materials are placed within the inner box to provide impact protection for the sputtering target before transport begins. This pre-positioned cushioning absorbs shocks and vibrations during transit, protecting the target without requiring complex active protection systems.
Solution Approach 2:
The transport box uses composite construction with an outer box made of aluminum, wood, or plastic-covered materials, and an inner box made of plastic. This combination of materials provides both structural strength for protection and controlled weight, avoiding excessive complexity while ensuring target safety.
3Ease of operation
If the transport box is designed for easy manual handling, then the ease of transport is improved, but the protection against impact and damage is reduced
Solution Approach 1:
The inner box acts as an intermediary between the sputtering target and the outer box. It provides a secure, cushioned environment for the target while being easily removable from the outer box, allowing simple manual handling of the inner box containing the target without compromising protection.
Solution Approach 2:
The transport box is designed to be transportable in an inclined state with the handle, changing the orientation dimension during transport. This allows easy manual rolling or tilting movement while the target remains protected in the cushioned inner box, separating the ease of movement from the protection function.
4Ease of operation
If the supports are positioned high for mechanical transport, then the mechanical handling is improved, but the floor face may be scratched during transport
Solution Approach 1:
Resin or wood cushioning material is affixed to the supports and bottom surfaces. This converts the potential harmful effect of hard support surfaces scratching the floor into a beneficial cushioning effect that protects both the floor and the transport box during inclined manual transport.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the safe, easy, and cost-effective transport of sputtering targets by preventing damage and facilitating single-person handling, while maintaining floor cleanliness and reducing the risk of breakage during transport and operation.
Implementation Method 1
a conductive thin film is affixed to the outer surface of the outer box in order to prevent electrification
Implementation Method 2
resin or wood for cushioning the impact with the floor face of a building is affixed to the respective faces of the periphery, corners and supports of the transport box
Data Source
AI summary
The present invention pertains to a sputtering target transport box having a void the size of a sputtering target, wherein supports for mechanical transport are provided to the bottom plate of the transport box, and a wheel for man-powered transport is provided to the edge portion of the bottom plate. Provided thereby is a sputtering target transport box in which the removal and transport of a sputtering target is easy, and which enables the transport of a sputtering target without causing any damage thereto.