Sputtering Target Vacuum Packaging via Segmented Flange Sealing
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Solution Overview
Problem
Cylindrical sputtering targets with flange parts and sealed caps pose challenges during vacuum packaging due to elongated shape and large inner volume, leading to incomplete evacuation and potential surface deterioration during shipping and storage.
Innovation Solution
A packaging method using a tubular sheet that covers the sputtering target, with seal parts on both ends, ensuring a vacuum state is maintained between the target and the packing material, and the flange part, with a gap of less than 10 mm after one week under atmospheric pressure, preventing air and moisture ingress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If vacuum suction is performed on a cylindrical sputtering target with a flange part and cap, then the target can be packaged for shipping and storage, but the packing material is caught on the flange part edge causing incomplete evacuation of air
Solution Approach 1:
The patent divides the packaging process into two distinct stages: first packaging the target body (excluding flange) to achieve vacuum, then separately packaging the flange part. This segmentation allows each part to be packaged optimally without interference, solving the problem of packing material being caught on the flange edge while maintaining reliable vacuum sealing.
Solution Approach 2:
The patent transitions from attempting to package the entire target (including flange) as a single unit to a two-dimensional approach where the flange part is packaged separately in a different spatial configuration. This dimensional change in the packaging approach eliminates the geometric interference caused by the flange edge.
2Quantity of substance
If the cylindrical sputtering target has a large inner volume and is elongated, then it can accommodate more target material, but it becomes difficult to bring the inside into a sufficiently vacuum state
Solution Approach 1:
The patent segments the large-volume target packaging into manageable sections by first packaging the main cylindrical body and then separately addressing the flange area. This allows vacuum to be effectively established in the large inner volume without the geometric constraints of the flange interfering with the vacuum sealing process.
3Strength
If the packing material contacts the flange part edge, then it can provide structural support, but air inside and outside the sputtering target cannot be successfully evacuated
Solution Approach 1:
The patent separates the structural support function from the vacuum sealing function by packaging the flange part separately after the main body is already vacuum-sealed. This ensures that the packing material providing structural support does not interfere with the vacuum evacuation process, as the critical vacuum seal is already established in the main body.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively maintains a vacuum state on both the inside and outside of the sputtering target, reducing the risk of surface deterioration and ensuring the target remains sealed during transportation.
Implementation Method 1
ensuring a vacuum state is maintained between the target and the packing material
Data Source
AI summary
A sputtering target packaging structure comprising:a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part; anda packing material made up of a sheet and covering an inner surface and an outer surface of the sputtering target in a close contact state, whereinthe packing material includes seal parts on both end sides of the sputtering target.