Sputtering Target Assembly for Fast Single-Person Replacement
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Solution Overview
Problem
Existing coating plants face challenges in safely and efficiently replacing targets due to their heavy weight and fixed mounting, requiring complex operations that prolong plant downtimes and necessitate multiple personnel for alignment and assembly.
Innovation Solution
A pre-assembled unit of dark space shield, target, and target backing plate, coupled via an eccentric shaft mechanism, allows for easy and safe target replacement within the coating plant, enabling single-person operation and minimizing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the target backing plate is screwed against insulators mounted in the coating chamber and the dark space shield is fixed using screws, then the target can be securely mounted, but the replacement process becomes complex and time-consuming requiring multiple personnel
Solution Approach 1:
The target assembly is segmented into a modular pre-assembled unit comprising the target, target backing plate, and dark space shield that can be handled as a single replaceable module. This segmentation allows the entire assembly to be removed and replaced as one unit, dramatically simplifying the replacement process while maintaining secure mounting through the coupling mechanism.
Solution Approach 2:
The dark space shield, target, and target backing plate are pre-assembled into a complete unit before installation in the coating chamber. This preliminary assembly allows alignment and preparation to be done outside the chamber, and the pre-assembled unit is then coupled to the magnet system using the coupling mechanism, enabling rapid replacement without complex in-chamber operations.
2Reliability
If the target and surrounding components have high weight and are mounted in a hanging position on the chamber lid or chamber wall, then secure mounting is achieved, but operations beneath the cathode must be avoided for safety reasons
Solution Approach 1:
The coupling mechanism acts as an intermediary between the pre-assembled target unit and the magnet system. It provides a safe interface for coupling and decoupling heavy components without requiring personnel to operate beneath the cathode. The coupling mechanism can be operated from a safe position while still achieving secure mounting of the heavy target assembly.
3Manufacturing precision
If alignment of the dark space shield with respect to the target is performed before definitive fixing, then proper positioning is achieved, but the process requires multiple personnel and extended time
Solution Approach 1:
The dark space shield is pre-aligned with the target during the pre-assembly process before the unit is installed in the coating chamber. This preliminary alignment ensures proper positioning is achieved outside the chamber, eliminating the need for time-consuming alignment operations inside the chamber and allowing rapid replacement by a single operator.
4Stability of the object's composition
If the target is fixed to the target backing plate and surrounded by the dark space shield, then structural stability is achieved, but the heavy weight requires complex mounting operations
Solution Approach 1:
The entire target assembly (target, backing plate, and dark space shield) is treated as a single segmented module that maintains its structural stability internally but can be handled as one unit externally. The coupling mechanism provides a simplified interface for mounting this stable but heavy assembly, reducing mounting operation complexity while preserving structural integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution facilitates rapid and safe target replacement, reducing plant downtime and simplifying the process by allowing alignment outside the plant, thus enhancing production efficiency.
Implementation Method 1
the coupling mechanism comprises one (or more) eccentric shaft(s)... a rotation of the eccentric shaft causes the unit consisting of dark space shield, target and target backing plate to be moved towards the magnet system and to be held in a defined position
Data Source
AI summary
The present invention relates to a coating plant for coating substrates by means of sputtering as well as a process for replacing a target in such a coating plant.