SRAM Gate Electrode Alignment for Uniform Pitch Layout

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Solution Overview

Problem

Conventional SRAM circuit designs face challenges in optimizing chip area usage and uniformity of performance due to non-uniform spacing and alignment of gate electrodes, leading to inefficiencies in SRAM array and peripheral circuit integration.

Innovation Solution

The integration of SRAM arrays with aligned gate electrodes of uniform pitch, extending across SRAM edge cell regions and abutting word line drivers and IO blocks, reduces chip area and enhances performance uniformity by eliminating conventional spacing and pattern-loading effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional SRAM circuit designs use non-uniform spacing and alignment of gate electrodes, then design flexibility is maintained, but chip area increases and performance uniformity deteriorates

Engineering Contradiction:
Improveperformance uniformityVSAvoidchip area
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The patent merges the gate electrode patterns of SRAM edge cell regions with adjacent word line drivers and IO blocks by aligning them to a common pitch. This integration eliminates the need for separate spacing between different circuit blocks, reducing overall chip area while ensuring uniform performance across all regions through consistent electrode alignment.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent applies a universal pitch alignment rule across multiple types of circuit blocks (SRAM edge cells, word line drivers, IO blocks). By using a common pitch standard for all gate electrodes regardless of functional block type, the design achieves both area efficiency and performance uniformity through standardized spacing and alignment.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If conventional SRAM circuit designs include spacing between different circuit blocks, then manufacturing simplicity is maintained, but chip area increases and performance uniformity deteriorates

Engineering Contradiction:
Improveperformance uniformityVSAvoidcircuit integration complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines previously separate circuit blocks (SRAM edge cells, word line drivers, IO blocks) into an integrated structure with continuously aligned gate electrodes at uniform pitch. This merging eliminates the need for separate spacing and reduces manufacturing complexity while improving performance uniformity across the entire circuit.

Inventive Principle:
Principle #5Merging (Combining)

3Area of stationary object

If gate electrodes are aligned across SRAM edge cell regions, word line drivers, and IO blocks, then chip area reduces and performance uniformity improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improvechip areaVSAvoidalignment precision
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent establishes a universal pitch alignment rule that applies uniformly across all gate electrodes in SRAM edge cell regions, word line drivers, and IO blocks. This standardized approach simplifies manufacturing by providing a single alignment reference, thereby reducing the actual precision burden despite the increased area efficiency and performance uniformity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS12041761B2SRAM circuits with aligned gate electrodes
Publication Date: 2024.07.16 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12041761B2 patent drawing
  • US12041761B2 patent drawing
  • US12041761B2 patent drawing

AI summary

A device includes a Static Random Access Memory (SRAM) array, and an SRAM cell edge region abutting the SRAM array. The SRAM array and the SRAM cell edge region in combination include first gate electrodes having a uniform pitch. A word line driver abuts the SRAM cell edge region. The word line driver includes second gate electrodes, and the first gate electrodes have lengthwise directions aligned to lengthwise directions of respective ones of the second gate electrodes.