SRAM Gate Layout With Shorter Pull-Down Channels for Read Stability

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Solution Overview

Problem

Existing SRAM technologies face challenges in achieving high-speed and low-power performance as IC technology nodes scale, leading to tradeoffs between SRAM speed and power consumption, and stability issues due to limited design flexibility.

Innovation Solution

The proposed solution involves optimizing SRAM layouts by shrinking the gate structures of pull-down transistors relative to pass-gate transistors, adjusting their effective channel lengths to achieve a beta ratio greater than 1, which increases the on-current of pull-down transistors and decreases their threshold voltage, thereby enhancing SRAM performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If gate-all-around (GAA) transistors are incorporated to reduce chip footprint, then area is reduced, but processing complexity increases

Engineering Contradiction:
Improvechip footprintVSAvoidprocessing complexity
Core Design Contradiction:
Area of moving objectVSDevice complexity

Solution Approach 1:

The gate structure is segmented into multiple portions (first gate portion, second gate portion, third gate portion) that can be independently formed and controlled. This segmentation allows complex 3D gate-all-around structures to be built through sequential deposition and etching steps, making the manufacturing process more manageable while achieving the desired area reduction

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar 2D transistor structures to three-dimensional 3D gate-all-around structures by adding vertical stacking dimensions. Multiple gate portions wrap around the channel in three dimensions, providing superior electrostatic control and enabling smaller footprint while the multi-step formation process addresses the increased processing complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of moving object

If channel length is decreased to increase functional density, then area is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvechip areaVSAvoidgeometry precision
Core Design Contradiction:
Area of moving objectVSManufacturing precision

Solution Approach 1:

The patent employs different channel length parameters (first channel length, second channel length, third channel length) for different gate portions, allowing optimization of electrical performance while maintaining manufacturability. By varying channel lengths rather than uniformly minimizing all dimensions, the design achieves high functional density without imposing equally stringent precision requirements across all features

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Different regions of the transistor structure have different channel lengths tailored to their specific functional requirements. The first gate portion has a different channel length than the second and third gate portions, allowing local optimization of electrical characteristics while maintaining overall device performance and reducing the need for ultra-precise uniform manufacturing across the entire structure

Inventive Principle:
Principle #3Local quality

3Area of moving object

If SRAM cell size is reduced to increase density, then area is reduced, but stability decreases

Engineering Contradiction:
ImproveSRAM cell areaVSAvoidSRAM stability
Core Design Contradiction:
Area of moving objectVSStability of the object's composition

Solution Approach 1:

The SRAM cell is segmented into multiple transistor components with differentiated gate structures. By dividing the transistor array into distinct gate portions with specific channel length ratios, the design achieves compact area while maintaining the electrical characteristics necessary for stable SRAM operation through optimized current ratios and threshold voltages

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent optimizes stability by controlling the ratio of channel lengths between different transistor types (pull-down, pass-gate, pull-up transistors). Specific parameter relationships (e.g., first channel length to second channel length ratio) are maintained to ensure proper beta ratios and threshold voltage relationships, enabling high-density cells to achieve required stability margins

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20230380130A1Memory structure and method for manufacturing the same
Publication Date: 2023.11.23 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20230380130A1 patent drawing
  • US20230380130A1 patent drawing
  • US20230380130A1 patent drawing

AI summary

A memory structure includes a first pull-up (PU) transistor and a first pull-down (PD) transistor sharing a first gate structure extending in a first direction, and a second PU transistor and a second PD transistor sharing a second gate structure extending in the first direction. The first gate structure has a first PU portion that corresponds with the first PU transistor and a first PD portion that corresponds with the first PD transistor. The second gate structure has a second PU portion that corresponds with the second PU transistor and a second PD portion that corresponds with the second PD transistor. The first and second PU portion each has a first dimension in a second direction perpendicular to the first direction, and the first and second PD portion each has a second dimension in the second direction. The first dimension is greater than the second dimension.