SRAM Switchable Power Paths for IR Drop Mitigation

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Solution Overview

Problem

As memory devices, such as SRAM, are scaled down, the oxide diffusion area becomes smaller, leading to increased resistance in backside power vias and a larger voltage drop (IR drop), which degrades the speed and performance of the SRAM.

Innovation Solution

The introduction of a footer/header system that allows for switchable power delivery paths, enabling the SRAM to switch between single-side and double-side power rails. This system minimizes leakage during standby/retention mode and facilitates high-speed operation during mission mode by optimizing power delivery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If memory devices are scaled down in size, then device dimensions are reduced, but resistance in backside power vias increases and voltage drop increases

Engineering Contradiction:
Improvedevice sizeVSAvoidpower delivery performance
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The power delivery system is segmented into multiple independent power delivery paths, including first and second power delivery paths from the backside and third and fourth power delivery paths from the frontside. This segmentation allows current to be distributed across multiple routes, reducing the resistance and voltage drop in each individual path while maintaining effective power delivery to the memory cell despite device scaling.

Inventive Principle:
Principle #1Segmentation

2Area of moving object

If oxide diffusion area is reduced, then device size is reduced, but resistance in power vias increases

Engineering Contradiction:
Improveoxide diffusion areaVSAvoidpower via resistance
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The invention transitions from relying solely on backside power delivery to utilizing both backside and frontside power delivery paths. By adding power delivery routes from the frontside (third and fourth power delivery paths), the system effectively adds another dimension to the power distribution architecture, compensating for the increased resistance caused by reduced oxide diffusion area and via size.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Productivity

If voltage drop increases, then power delivery efficiency decreases, but device scaling continues

Engineering Contradiction:
Improvedevice scalingVSAvoidvoltage drop
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The invention merges multiple power delivery paths (first, second, third, and fourth paths) into a unified power delivery system. By combining these parallel paths, the total current can be distributed across all routes, reducing the overall voltage drop and power loss while enabling continued device scaling. The merged system provides redundant and complementary power delivery routes that compensate for losses in individual paths.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively mitigates the IR drop issue, improving the speed and performance of SRAM during mission mode while conserving power during standby/retention mode, thus enhancing overall power management and efficiency.

Implementation Method 1

a first conductor structure disposed on a backside of the substrate and configured to carry a supply voltage

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20250118632A1Memory devices with switchable power delivery paths
Publication Date: 2025.04.10 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250118632A1 patent drawing
  • US20250118632A1 patent drawing
  • US20250118632A1 patent drawing

AI summary

A memory device may comprise a substrate, a plurality of memory cells, and a header device. The substrate may have a first side and a second side opposite to each other. The plurality of memory cells may be formed on the first side of the substrate. The header device may be formed on the first side of the substrate. The header device can be configured to selectively couple a supply voltage through a first combination of power delivery paths or a second combination of power delivery paths to the plurality of memory cells based on a control signal.