Dimensionally Stable Mounting Modules for Microfeature Workpiece Processing
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Solution Overview
Problem
Current wet chemical processing tools face challenges in accurately calibrating transport systems, maintaining processing chambers, and manufacturing customized configurations, leading to inefficiencies and increased costs due to manual alignment processes and frequent downtime for maintenance.
Innovation Solution
The introduction of universal intermediate modules with dimensionally stable mounting systems that allow for precise alignment and quick calibration of robots, enabling the attachment of processing stations and chambers without manual teaching, and facilitating the production of customized tool configurations using fewer components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual teaching and alignment processes are used to calibrate transport systems, then the robot can be positioned at chamber locations, but the process is extremely time-consuming and subject to operator error
Solution Approach 1:
The patent replaces manual mechanical alignment and teaching processes with an automated optical measurement system. The sensor unit automatically measures chamber positions and calculates robot motion parameters, eliminating the need for manual robot positioning and encoder value recording. This substitution of mechanical manual operations with automated optical-mechanical systems resolves the contradiction by achieving high precision calibration without the time-consuming manual processes.
2Reliability
If processing chambers are repaired or maintained, then the tool can continue operating, but the tool must be taken offline for extended periods resulting in throughput loss
Solution Approach 1:
The patent enables preliminary positioning of replacement processing chambers using automated measurement systems before they are fully integrated into the tool. Chambers can be pre-positioned and calibrated outside the tool, then quickly installed without requiring extended offline calibration time. This preliminary action allows maintenance to be performed with minimal impact on tool throughput, resolving the contradiction between maintaining chamber reliability and preserving productivity.
3Adaptability or versatility
If customized tool configurations are manufactured, then specific customer requirements are met, but the manufacturing process becomes more complex and costly
Solution Approach 1:
The patent employs universal intermediate modules with standardized interfaces and dimensionally stable mounting systems that can accommodate different processing chambers and configurations. These modular components can be arranged in various configurations to meet specific customer requirements while using the same standardized parts. This universality allows customized tool configurations to be manufactured using repeatable, standardized processes rather than completely custom manufacturing, resolving the contradiction between adaptability and ease of manufacture.
4Manufacturing precision
If alignment elements are engaged with docking units, then precise positioning is achieved, but the system requires complex docking and alignment mechanisms
Solution Approach 1:
The patent introduces alignment elements as intermediary components between processing chambers and docking units. These alignment elements serve as mediators that automatically guide and position chambers precisely during the docking process. The alignment elements simplify the docking mechanism by providing automatic alignment guidance, reducing the need for complex manual alignment procedures while maintaining high positioning accuracy, thus resolving the contradiction between manufacturing precision and device complexity.
Data Source
AI summary
An intermediate module comprising a dimensionally stable mounting module and a first device attached to the dimensionally stable mounting module. The dimensionally stable mounting module can include a front docking unit with front alignment elements for connecting the mounting module to a load/unload module, and a rear docking unit with rear alignment elements for connecting the mounting module to a main processing unit. The mounting module can further include a deck between the front docking unit and the rear docking unit, positioning elements at the deck, and attachment elements at the deck. The first device can be a processing chamber, an annealing station, a metrology station, a buffer station, or another type of component for holding or otherwise performing a function on a workpiece. The first device has a device interface member engaged with one of the positioning elements and a device fastener engaged with one of the attachment elements so that the first device is positioned precisely at a known location in a fixed reference frame defined by the mounting module.