Stacked Solid-State Battery Structure With Etched Support Substrates

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Solution Overview

Problem

Existing battery structures, particularly solid thin film batteries, face limitations in achieving large capacity due to substrate thickness constraints, which hinder effective stacking and material choices for cathodes, leading to insufficient energy capacity and fabrication challenges.

Innovation Solution

A method for fabricating a stacked battery structure involves etching the support substrate while protecting the film battery element with a protection layer, allowing for thinner total thickness and increased capacity by alternating battery layers, and forming conductive paths through via holes using laser processing and wet-etching techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of stationary object

If the substrate thickness is reduced to achieve thinner battery structure, then the total thickness is reduced, but the mechanical strength and handling difficulty deteriorate

Engineering Contradiction:
Improvesubstrate thicknessVSAvoidmechanical strength
Core Design Contradiction:
Length of stationary objectVSStrength

Solution Approach 1:

A support substrate is introduced as an intermediary component during the fabrication process. The support substrate provides mechanical strength and handlesability during manufacturing, then is selectively removed through etching to achieve the desired thin final structure. This mediator allows the battery to be fabricated with thin substrates without suffering from mechanical weakness during the fabrication process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The support substrate is attached to the battery substrate before the battery elements are fully fabricated. This preliminary action ensures that the substrate has adequate mechanical strength during subsequent fabrication steps, and the support is removed only after the battery structure is complete and ready for final use.

Inventive Principle:
Principle #10Preliminary action

2Quantity of substance

If multiple battery layers are stacked to increase capacity, then the energy capacity is improved, but the total thickness increases

Engineering Contradiction:
Improveenergy capacityVSAvoidtotal thickness
Core Design Contradiction:
Quantity of substanceVSLength of stationary object

Solution Approach 1:

The support substrates are selectively removed through etching processes after the battery layers are stacked. This extraction of the support substrate reduces the overall thickness contribution from the substrate, allowing multiple battery layers to be stacked for increased capacity while minimizing the thickness penalty. The support substrate is taken out only after it has served its purpose during fabrication.

Inventive Principle:
Principle #2Taking out (Extraction)

3Length of stationary object

If mechanical grinding is used to thin the substrate, then the substrate thickness is reduced, but the minimum achievable thickness is limited

Engineering Contradiction:
Improvesubstrate thicknessVSAvoidminimum thickness achievement
Core Design Contradiction:
Length of stationary objectVSManufacturing precision

Solution Approach 1:

Mechanical grinding is replaced with a chemical etching process to thin the support substrate. The etching process uses chemical reactions to remove material, allowing for much thinner final thicknesses to be achieved compared to mechanical methods. This substitution enables the support substrate to be reduced to thicknesses that would be impossible with purely mechanical grinding.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Ease of manufacture

If sequential physical vapor deposition is used to fabricate multiple layers, then the integration is simplified, but the cathode material selection is limited

Engineering Contradiction:
Improvefabrication integrationVSAvoidcathode material selection
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The fabrication process is segmented into separate steps for different battery layers, with each layer being fabricated independently on its own support substrate. This segmentation allows different cathode materials to be used in different layers without requiring sequential deposition in a single vacuum chamber. Each layer can be optimized for its specific material requirements, then the layers are stacked and support substrates are removed.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enables a battery structure with reduced total thickness and maintained capacity, facilitating efficient stacking and cost-effective production, while allowing for broader material choices and improved contact reliability between conductive paths.

Implementation Method 1

the support substrate can be eliminated completely by cost effective wet-etching without damage on the film battery element behind the protection layer

Methodology Applied
Scientific EffectChemical resistance:

Implementation Method 2

removing the support substrate includes wet-etching the support substrate until reaching the protection layer

Methodology Applied
Scientific EffectWet-etching:

Data Source

PatentUS12609360B2Large capacity solid state battery
Publication Date: 2026.04.21 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US12609360B2 patent drawing
  • US12609360B2 patent drawing
  • US12609360B2 patent drawing

AI summary

A technique relating to a battery structure is disclosed. Abase substrate and a battery layer having a support substrate are prepared. The battery layer includes a protection layer formed on the support substrate, a film battery element formed on the protection layer and an insulator covering the film battery element. The battery layer is placed onto the base substrate with the bottom of the support substrate facing up. The support substrate is then removed from the battery layer at least in part by etching while protecting the film battery element by the protection layer. A stacked battery structure including the base substrate and the two or more battery layers is also disclosed.