Stacked Semiconductor Chip Assembly for Precise Alignment

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Solution Overview

Problem

Existing semiconductor devices face challenges in efficiently stacking and aligning multiple chips while maintaining electrical connections and structural integrity.

Innovation Solution

A method of stacking semiconductor chips in a shifted manner with die attach films and connection wires, followed by flip-chip mounting and encapsulation with a mold resin layer to ensure proper alignment and electrical connectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If multiple chips are stacked in a conventional manner, then the number of chips can be increased, but the alignment precision and electrical connectivity between chips deteriorate

Engineering Contradiction:
Improvenumber of stacked chipsVSAvoidalignment precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent introduces intermediate structures (support chips and connection chips) that segment the stacking process into manageable stages. Each chip is bonded to a support chip first, then multiple support chips are interconnected through connection chips, enabling precise alignment at each stage rather than attempting to align all chips simultaneously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Support chips and connection chips serve as intermediary elements that facilitate the bonding process. These intermediaries provide stable platforms for mounting active chips and enable electrical connections between stacked chips through conductive structures, resolving the alignment and connectivity issues.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Quantity of substance

If multiple chips are stacked to increase capacity, then the functionality is enhanced, but the structural integrity and reliability deteriorate

Engineering Contradiction:
Improvenumber of stacked chipsVSAvoidstructural integrity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent employs support chips with larger areas than the active chips they support. These oversized support structures act as cushioning elements that distribute mechanical stresses and provide structural stability, preventing stress concentration that could compromise the reliability of the stacked configuration.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent uses different material compositions for different functional layers: support chips provide mechanical strength, connection chips provide electrical conductivity through conductive bump electrodes, and active chips provide computational functionality. This composite approach optimizes each layer for its specific function while ensuring overall structural integrity.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If conventional chip stacking is used, then the device can be manufactured, but the electrical connectivity between chips is insufficient

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidelectrical connectivity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces conventional mechanical wire bonding with direct mechanical-electrical integration through bump electrodes. The connection chips feature conductive bump structures that form direct electrical contacts with pads on support chips, eliminating the need for separate wiring processes and improving both connectivity reliability and manufacturing efficiency.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12354999B2Semiconductor device and method of manufacturing the same
Publication Date: 2025.07.08 KIOXIA CORP
  • US12354999B2 patent drawing
  • US12354999B2 patent drawing
  • US12354999B2 patent drawing

AI summary

A semiconductor device includes: a wiring substrate in which a wiring layer is provided; a first semiconductor chip that is provided above the wiring substrate and on a surface of which a first pad is formed, the surface being on a side closer to the wiring substrate; a second semiconductor chip that is provided on the first semiconductor chip through a first resin layer and on a surface of which a second pad is formed, the surface being on a side opposite the wiring substrate; a third semiconductor chip that is provided on the second semiconductor chip through a second resin layer and on a surface of which a third pad is formed, the surface being on the side closer to the wiring substrate; and a first wire connecting the first pad and the third pad; and a second wire connecting the second pad and the wiring substrate.