Stacked Chip Optical Coupling With Protrusion-Groove Alignment

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Solution Overview

Problem

Existing technologies face challenges in efficiently integrating stacked photonic chips for applications in telecommunications, data communications, sensing, and quantum computing, as they often result in high optical signal loss and inefficient coupling between different types of chips or wafers.

Innovation Solution

A method of forming a structure by stacking chips with an optical waveguide protrusion positioned in a groove of the second chip, using laser ablation and lithography to precisely align and bond the chips, facilitating optical coupling with reduced loss through dielectric and metal-metal bonding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional stacking methods are used to integrate photonic chips, then chip integration is achieved, but optical signal loss increases and coupling efficiency decreases

Engineering Contradiction:
Improveoptical signal transmission qualityVSAvoidoptical signal loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent introduces an optical waveguide protrusion as an intermediary structure that extends from the first chip into the second chip, and a corresponding groove in the second chip to receive it. This intermediary waveguide structure mediates the optical coupling between the two chips, enabling efficient optical signal transmission while reducing optical signal loss compared to conventional direct stacking methods

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent transitions from planar optical coupling to three-dimensional optical coupling by having the optical waveguide protrusion extend vertically from the first chip into the second chip. This dimensional change allows for more efficient optical field overlap and coupling between chips, improving optical signal transmission quality while reducing loss

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If chips are stacked to increase functionality, then device capabilities are enhanced, but alignment precision between chips becomes more difficult to achieve

Engineering Contradiction:
Improvedevice functionalityVSAvoidalignment precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The optical waveguide protrusion and groove structures are formed during the chip fabrication process before stacking. The protrusion is pre-formed on the first chip and the groove is pre-formed on the second chip, establishing predetermined alignment features that guide the stacking process and ensure precise alignment between chips, thereby maintaining manufacturing precision while enabling enhanced device functionality

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The optical waveguide protrusion creates an asymmetric structural feature that provides unique alignment cues during stacking. This asymmetric geometry ensures that the chips can only be assembled in the correct orientation and position, automatically achieving precise alignment without requiring complex alignment mechanisms, thus maintaining manufacturing precision while enabling versatile device functionality

Inventive Principle:
Principle #4Asymmetry

3Reliability

If optical waveguides are extended above dielectric layers to improve coupling, then optical coupling efficiency increases, but structural complexity increases

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The optical waveguide protrusion serves multiple functions: it extends the optical waveguide path between chips for efficient optical coupling, provides a mechanical interlocking feature with the groove for structural stability, and acts as an alignment reference during assembly. By combining multiple functions into a single structure, the patent achieves improved optical coupling efficiency without proportionally increasing structural complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enables efficient optical signal transmission between stacked chips with minimal loss, allowing for the creation of 3D device stacks with improved functionality and reduced optical coupling losses.

Implementation Method 1

using laser ablation and lithography to precisely align and bond the chips

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The optical waveguide protrusion extends above the first surface of the first chip. The structure further includes a second chip having a second surface adjacent to the first surface of the first chip

Methodology Applied
Scientific EffectOptical waveguide: Waveguide (optics)

Data Source

PatentUS20250258341A1Optical coupling between stacked chips
Publication Date: 2025.08.14 GLOBALFOUNDRIES US INC
  • US20250258341A1 patent drawing
  • US20250258341A1 patent drawing
  • US20250258341A1 patent drawing

AI summary

A structure includes a first chip having a first surface and a second chip having a second surface adjacent to the first surface of the first chip. The first chip includes a first optical component and an optical waveguide protrusion adjacent to the first optical component. The optical waveguide protrusion extends above the first surface of the first chip. The second chip includes a second optical component and a groove adjacent to the second optical component. The groove extends from the second surface of the second chip and into a portion of the second chip. The optical waveguide protrusion is positioned in the groove in the second chip.