3D Chip Microfluidic Channel Layout for Passive Heat Transfer

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Solution Overview

Problem

Three-dimensional chips face overheating issues due to the stacking of two-dimensional integrated circuits, which can lead to thermal management challenges as the heat generated by electronic and photonic components is not effectively dissipated.

Innovation Solution

Incorporating microfluidic channel layers with working fluid that flow through and along the layers to provide passive heat transfer, potentially using oscillating heat pipes or two-phase cooling systems, along with vias for electrical signal transfer and fluid flow between circuit layers, to facilitate heat dissipation to a heat rejection surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If integrated circuit layers are stacked in three-dimensional configuration, then chip footprint is reduced, but heat dissipation becomes more difficult

Engineering Contradiction:
Improvechip footprintVSAvoidheat dissipation
Core Design Contradiction:
Area of stationary objectVSTemperature

Solution Approach 1:

The patent transitions from two-dimensional planar heat dissipation to three-dimensional heat transfer by incorporating microfluidic channels that extend through multiple stacked circuit layers. The channels include vertical portions extending through substrates and horizontal portions extending along circuit layers, enabling heat to be transported from internal heat-generating regions to external heat sinks in three-dimensional space, thereby solving the heat dissipation difficulty while maintaining the compact stacked configuration

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs a fluid-based cooling system where a coolant flows through microfluidic channels formed within the stacked structure. The fluid absorbs heat from electronic components through thermal conduction and transports it away from the chip, effectively managing thermal loads in the three-dimensional stacked configuration. This hydraulic approach enables efficient heat removal that would be difficult to achieve with traditional air cooling or conduction-only methods

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Temperature

If microfluidic channels are integrated into chip layers, then heat transfer efficiency is improved, but device complexity increases

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoiddevice complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into the microfluidic channel structure: the same channels serve both as heat transfer pathways and as structural elements integrating circuit layers. The channels are formed within the substrate material itself rather than being separate components, and vias that provide electrical connections between layers also serve as fluid flow pathways, thereby reducing overall device complexity while maintaining effective heat transfer

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements multi-functional elements where vias serve dual purposes: providing electrical signal transfer between stacked circuit layers and simultaneously serving as microfluidic channels for coolant flow and heat transfer. This multi-functionality reduces the number of separate components needed, simplifying the overall device structure while achieving effective thermal management across the three-dimensional stack

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient passive heat transfer within the three-dimensional chip, reducing the risk of overheating and allowing for a smaller footprint compared to traditional two-dimensional chips, while also enabling electrical signal transfer through the same vias.

Implementation Method 1

the microfluidic channels are configured to enable working fluid to flow through the microfluidic channels to provide passive heat transfer means for the one or more electronic and/or photonic components

Methodology Applied
Scientific EffectPassive heat transfer: Convection

Implementation Method 2

the microfluidic channels are configured to enable heat transfer from the integrated chip layers, though the three-dimensional chip to the heat rejection surface

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 3

The passive heat transfer means may comprise an oscillating heat pipe

Methodology Applied
Scientific EffectOscillating heat pipe: Heat Pipe

Implementation Method 4

The passive heat transfer mean may comprise a two-phase cooling system

Methodology Applied
Scientific EffectTwo-phase cooling: Phase Change

Data Source

PatentEP4322211A1Three-dimensional chip comprising heat transfer means
Publication Date: 2024.02.14 NOKIA TECHNOLOGIES OY
  • EP4322211A1 patent drawingFigure 1~2
  • EP4322211A1 patent drawingFigure 3
  • EP4322211A1 patent drawingFigure 4A~4E

AI summary

Examples of the disclosure relate to a three-dimensional chip. The three-dimensional chip comprises a plurality of integrated circuit layers and one or more microfluidic channel layers. The plurality of integrated circuit layers comprises one or more electronic and/or photonic components and are arranged in a stack. The one or more microfluidic channel layers are positioned between integrated circuit layers. The microfluidic channel layers comprise microfluidic channels and the microfluidic channels are configured to enable working fluid to flow through the microfluidic channels to provide passive heat transfer means for the one or more electronic and/or photonic components in the integrated circuit layers. The microfluidic channels comprise one or more portions that extend along a microfluidic channel layer and one or more portions that extend through a microfluidic channel layer.