Stacked CMOS Photodiode Sub-PDs for Full Well Capacity

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Solution Overview

Problem

CMOS image sensors face a limitation in achieving high full well capacity (FWC), which restricts their ability to capture a wide dynamic range, especially in applications requiring ultra dim and bright scene capture with good quality, such as automotive and security applications.

Innovation Solution

The proposed CMOS image sensor design incorporates a top photodiode and a bottom photodiode with sub-photodiodes and sub-wells, allowing for increased junction capacitance and charge storage density, achieved through a layered structure and specific doping processes, enabling higher full well capacity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a conventional single photodiode structure is used, then the device complexity is low, but the full well capacity is insufficient for high dynamic range applications

Engineering Contradiction:
Improvefull well capacityVSAvoidphotodiode structure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The photodiode is divided into multiple sub-photodiodes arranged in a stacked configuration within the same pixel area. This segmentation allows each sub-photodiode to contribute to charge storage capacity while maintaining a compact vertical structure, thereby increasing full well capacity without proportionally increasing lateral device complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a conventional lateral photodiode arrangement to a vertical stacked configuration. By stacking sub-photodiodes in the vertical dimension rather than arranging them laterally, the design increases charge storage capacity within the same pixel footprint while managing structural complexity through vertical integration

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If the photodiode area is increased to improve full well capacity, then the charge storage density increases, but the pixel size increases reducing the number of pixels per sensor

Engineering Contradiction:
Improvecharge storage densityVSAvoidpixel size
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent achieves higher charge storage density by stacking sub-photodiodes vertically within the same lateral pixel boundaries. This vertical stacking allows multiple photodiode junctions to occupy the same footprint area, increasing charge capacity without expanding the pixel's lateral dimensions

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Quantity of substance

If multiple photodiodes are stacked vertically, then the full well capacity increases, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvefull well capacityVSAvoiddoping precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The photodiode structure is segmented into multiple sub-photodiodes with distinct doping regions. Each sub-photodiode can be formed with controlled doping parameters, allowing precise charge storage characteristics to be achieved through modular doping processes rather than requiring a single complex doped structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different sub-photodiodes within the stacked structure can have different doping concentrations and profiles optimized for their specific functions. This local quality variation allows each sub-photodiode to be precisely manufactured with tailored electrical properties while maintaining overall structural integrity

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances charge storage density and quantum efficiency, allowing the CMOS image sensor to capture a wider dynamic range, effectively addressing the need for improved FWC and dynamic range in various applications.

Implementation Method 1

A complementary metal-oxide-semiconductor (CMOS) image sensor has been widely applied to mobile applications

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20180374888A1CMOS image sensor, a photodiode thereof and a method of forming the same
Publication Date: 2018.12.27 HIMAX IMAGING LIMITED
  • US20180374888A1 patent drawing
  • US20180374888A1 patent drawing
  • US20180374888A1 patent drawing

AI summary

A photodiode (PD) of a complementary metal-oxide-semiconductor (CMOS) image sensor includes a top PD of a second type disposed in a first-type layer; and a bottom PD of the second type disposed in the first-type layer and below the top PD, the bottom PD including at least one sub-photodiode (sub-PD) of the second type connected to the top PD and at least one sub-well of the first type surrounded by the at least one sub-PD.