Vertically Stacked Collecting Vessels with Elevation Units

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Solution Overview

Problem

Existing substrate cleaning apparatuses face challenges in efficiently collecting and directing processing solutions during semiconductor fabrication, leading to potential contamination and yield reduction due to solution flow into unintended collecting vessels.

Innovation Solution

A substrate treating apparatus with vertically stacked collecting vessels and elevation units, each driven by a driver, ensures independent collection of multiple processing solutions by controlling the vertical position of each vessel to prevent solution flow into non-target vessels.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple collecting vessels are stacked vertically to collect different processing solutions, then the collection efficiency and independence of multiple solutions is improved, but the risk of solution flow into non-target vessels increases due to vertical arrangement

Engineering Contradiction:

Improvesolution collection efficiencyVSAvoidcontamination from solution misdirection

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The collecting vessels are made movable through elevation units that can adjust their vertical positions independently. This dynamic positioning allows the system to optimize both collection efficiency and contamination prevention by controlling which vessel is at the active collection level at any given time, preventing solutions from flowing into non-target vessels while maintaining high collection efficiency

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system incorporates sensors to detect the presence and level of processing solutions in each collecting vessel. This feedback mechanism enables automatic control of the elevation units to position vessels appropriately, ensuring that solutions are collected efficiently while preventing overflow or misdirection into non-target vessels through real-time monitoring and adjustment

Inventive Principle:

Principle #23Feedback

2Adaptability or versatility

If collecting vessels are made movable with elevation units, then the ability to direct solutions to specific vessels is improved, but the device complexity increases due to additional driving mechanisms

Engineering Contradiction:

Improvesolution directing capabilityVSAvoidelevation unit structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The elevation units are designed with a universal structure that can handle multiple collecting vessels using the same driving mechanism. Each elevation unit serves multiple vessels simultaneously, allowing the system to achieve high adaptability in directing solutions to specific vessels while minimizing the overall number of driving mechanisms required, thus reducing device complexity

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The collecting vessels are arranged in a nested vertical configuration where multiple vessels are stacked one above another. The elevation units access and move these nested vessels through a shared drive mechanism, enabling versatile solution directing capability while compacting the structure and reducing the number of independent driving components needed

Inventive Principle:

Principle #7Nested doll (Nesting)

3Area of stationary object

If inlets of collecting vessels are vertically stacked, then the space utilization is improved, but the control precision required to prevent solution cross-contamination increases

Engineering Contradiction:

Improvefootprint areaVSAvoidvessel positioning accuracy

Core Design Contradiction:

Area of stationary objectVSManufacturing precision

Solution Approach 1:

The system replaces purely mechanical positioning with a combination of mechanical elevation units and sensor-based detection. Sensors monitor the vertical positions and solution levels in each vessel, providing feedback that enables precise control without requiring extremely high mechanical positioning accuracy. This substitution reduces the stringent precision requirements while maintaining effective prevention of solution cross-contamination in the compact vertical arrangement

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS9922850B2Apparatus for treating substrate

Publication Date: 2018.03.20 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

Disclosed is a substrate treating apparatus which includes a treating container having a treating space therein and including a plurality of collecting vessels surrounding the treating space and provided such that inlets for inputting a fluid in the treating space are vertically stacked on each other, a support unit supporting a substrate in the treating space, a solution supply unit supplying a treating solution to the substrate supported by the support unit, and elevation units respectively joined with the collecting vessels and lifting up and down the collecting vessels. Each of the elevation units includes a base having a ring shape and joined with a corresponding collecting vessel, an elevation load joined with the base, and a driver lifting up and down the elevation load.