Stacked Conductive Sub-Patterns for Display Substrates

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Solution Overview

Problem

The sputtering process for forming thick copper wires on display substrates generates significant stress, leading to performance issues and reduced product yield due to substrate bending or breakage in liquid crystal display (LCD) and organic light emitting diode (OLED) products.

Innovation Solution

A method involving the formation of a conductive pattern through multiple stacked conductive sub-patterns, where each sub-pattern includes a metal layer and a first conductive buffer layer, with the buffer layer protecting the metal from oxidation and enhancing adhesion between layers, reducing stress on the substrate by allowing complete stress release during etching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If thick copper wires are formed through sputtering process, then low resistance is achieved, but large stress is generated causing substrate bending or breakage

Engineering Contradiction:
Improveproduct yieldVSAvoidstress
Core Design Contradiction:
ReliabilityVSStress or pressure

Solution Approach 1:

The patent divides the single thick copper wire structure into multiple stacked conductive sub-patterns (first conductive sub-pattern, second conductive sub-pattern, etc.) with buffer layers between them. Each sub-pattern can be formed with controlled thickness, and the stress from each layer can be independently managed through the buffer layers, preventing cumulative stress from causing substrate bending or breakage while maintaining low overall resistance through the stacked conductive paths.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces buffer layers (first buffer layer, second buffer layer, etc.) as intermediary structures between adjacent conductive sub-patterns. These buffer layers serve as stress-absorbing intermediaries that prevent direct stress transmission between the rigid copper layers and the substrate, allowing stress to be distributed and managed without causing substrate deformation or failure.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If thick copper wires are formed through sputtering process, then low resistance is achieved, but substrate bending or breakage occurs

Engineering Contradiction:
Improvesubstrate integrityVSAvoidsubstrate strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent segments the thick copper wire into multiple thinner conductive sub-patterns stacked vertically. This segmentation reduces the stress imposed on the substrate by any single layer, preventing substrate bending or breakage while maintaining electrical conductivity through the stacked configuration. The substrate strength is preserved because no single layer creates excessive localized stress.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The buffer layers act as protective intermediaries between the conductive sub-patterns and the substrate, absorbing and distributing mechanical stress to prevent substrate damage. This intermediary structure preserves substrate integrity by preventing direct stress concentration that would cause bending or breakage.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If multiple stacked conductive sub-patterns are formed, then stress is reduced and substrate integrity is maintained, but manufacturing process complexity increases

Engineering Contradiction:
Improvesubstrate integrityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple patterning steps into a unified manufacturing flow where buffer layers and conductive sub-patterns are formed in an integrated sequence. The buffer layers serve dual purposes: electrical isolation and stress management. This merging of functions reduces the number of separate process modules needed, managing manufacturing complexity while achieving the desired stress distribution and substrate integrity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The buffer layers are designed to perform multiple functions simultaneously: providing electrical isolation between conductive sub-patterns, managing stress distribution, and serving as etch stop layers. This multi-functionality reduces the need for additional dedicated structures, simplifying the overall manufacturing process while maintaining substrate integrity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves product yield and achieves a low-resistance conductive pattern without substrate bending, ensuring the integrity and performance of display substrates.

Implementation Method 1

forming a metal layer by a sputtering process using Cu

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS11177134B2Conductive pattern and method for manufacturing the same, thin film transistor, display substrate, and display device
Publication Date: 2021.11.16 BEIJING BOE TECH DEV CO LTD
  • US11177134B2 patent drawing
  • US11177134B2 patent drawing
  • US11177134B2 patent drawing

AI summary

A conductive pattern and a method for manufacturing the same, a thin film transistor, a display substrate and a display device are provided. The method includes: step A, forming a metal layer on a base substrate; step B, forming a first conductive buffer layer on the metal layer; step C, patterning the metal layer and the first conductive buffer layer to form a conductive sub-pattern; and performing steps A to C repeatedly for N times to form N conductive sub-patterns that are stacked on the base substrate. The conductive pattern comprises the N conductive sub-patterns, and N is a positive integer greater than 1.