Stacked Die Package With Hybrid Bonded Capacitor Integration
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Solution Overview
Problem
The integration of multiple semiconductor devices in wafer level packaging has become a challenge due to the complexity of interconnecting and packaging these devices efficiently.
Innovation Solution
The manufacturing process involves forming a semiconductor substrate with devices, an interconnection structure with conductive patterns and vias, and capacitors, followed by a hybrid bonding process to stack and connect dies, allowing for efficient electrical connection and packaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple semiconductor devices are integrated in wafer level packaging, then the integration density increases, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
The patent segments the interconnection structure into modular components including conductive patterns, vias, and capacitor structures that can be independently formed and stacked. This segmentation allows complex multi-device integration to be achieved through repeated modular stacking rather than creating entirely new interconnection paths for each device, thereby increasing integration density while managing complexity through standardization.
Solution Approach 2:
The patent transitions from planar 2D packaging to 3D vertical stacking by forming capacitors and interconnection structures in multiple layers above the semiconductor substrate. This dimensional change allows multiple devices to be integrated vertically, significantly increasing integration density while the standardized layering approach helps manage the complexity of interconnections.
2Area of stationary object
If capacitor area is reduced for miniaturization, then package size decreases, but manufacturing precision requirements increase
Solution Approach 1:
The patent implements nested capacitor structures where conductive patterns and dielectric layers are stacked within each other in vertical layers. This nesting allows capacitors to achieve the required capacitance values in reduced planar area by utilizing vertical space, while the standardized layering process maintains manufacturing precision through repeated deposition and patterning steps.
Solution Approach 2:
The patent uses composite dielectric materials and conductive pattern structures that combine multiple materials with different properties to achieve the desired electrical characteristics in reduced area. The composite structures allow for optimized electrical performance while maintaining manufacturability through established material deposition and patterning processes.
Data Source
AI summary
A package includes a first die and a second die. The first die includes a first capacitor. The second die includes a second capacitor. The second die is stacked on the first die and is located within a span of the first die. The first capacitor is electrically connected to the second capacitor.


