Stacked Die Ground Shield for Noise Isolation

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Solution Overview

Problem

In stacked semiconductor devices, noise interference from one chip can disrupt sensitive components like microcontrollers when they are arranged in a stacked configuration with power transistors or noisy dies.

Innovation Solution

A ground shield is created by depositing an oxide layer on the back of the noisy die and a metal layer on top of it, which is then bonded to a lead frame and connected to a voltage source, providing a shielding voltage to isolate noise from the sensitive controller die.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple chips are stacked in a single device, then device integration and compactness are improved, but noise interference between chips increases

Engineering Contradiction:
Improvedevice integrationVSAvoidnoise interference
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

A ground shield layer is introduced as an intermediary between the power transistor die and the controller die. This ground shield acts as a mediator that blocks electromagnetic noise and interference from the power transistor die from reaching the controller die, while allowing both dies to maintain their stacked configuration for compact integration.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If a ground shield is added between stacked dies, then noise immunity is improved, but device complexity increases

Engineering Contradiction:
Improvenoise immunityVSAvoiddevice complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The ground shield is merged with the existing packaging structure by forming it as part of the interconnect substrate or lead frame. This integration approach combines the shielding function with the existing mechanical support and electrical interconnection structure, avoiding the need for separate shielding components and minimizing additional complexity.

Inventive Principle:
Principle #5Merging (Combining)

3Area of stationary object

If chips are stacked in flip-chip fashion, then space utilization is improved, but noise coupling between dies increases

Engineering Contradiction:
Improvespace utilizationVSAvoidnoise coupling
Core Design Contradiction:
Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

The ground shield extends in the vertical dimension between the stacked dies, creating a three-dimensional shielding structure. This vertical placement in the z-dimension effectively blocks noise coupling paths between the front-facing surfaces of the stacked dies while maintaining their compact horizontal footprint for efficient space utilization.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces noise interference between stacked dies, enhancing noise immunity in multi-chip modules while maintaining a low-cost stacking arrangement.

Implementation Method 1

depositing a layer of oxide & metal on the back of the wafer may create a voltage shield to keep noise out of the controller die

Methodology Applied
Scientific EffectElectrostatic shielding: Faraday Cage

Data Source

PatentEP3437131A1Stacked die ground shield
Publication Date: 2019.02.06 MICROCHIP TECHNOLOGY INC

AI summary

The present disclosure relates to semiconductor devices. Embodiments of the teachings thereof may include processes for manufacturing of semiconductor devices and the devices themselves. For example, some embodiments may include an integrated circuit package comprising: a lead frame; a first die mounted on the lead frame in flip-chip fashion, with a frontside of the first die connected to the lead frame; wherein the first die comprises an oxide layer deposited on a backside of the first die and a back metal layer deposited on the oxide layer; and a second die mounted on the back metal layer of the first die.