Stacked Memory-Logic Die Interconnect Layout for 3D Routability

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Solution Overview

Problem

The integration of semiconductor devices and components in high-density integrated circuits faces challenges in achieving efficient electrical connectivity and routability between memory and logic dies, particularly in stacked structures, which affects performance and manufacturing compatibility.

Innovation Solution

The integration of memory and logic dies in a chiplet form with connecting structures, utilizing a wafer-level packaging process that includes a substrate, device layer, interconnect, and through vias to facilitate short electrical connections and improved routability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If memory and logic dies are integrated in high-density stacked structures, then integration density is improved, but electrical connectivity and routability between dies deteriorate

Engineering Contradiction:
Improveintegration densityVSAvoidelectrical connectivity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent divides the semiconductor device into separate memory dies and logic dies that are stacked vertically. Each die is independently fabricated and then bonded together, allowing high integration density while maintaining separate optimized designs for each function. The segmentation enables through-via connections to penetrate through multiple die layers, establishing reliable electrical pathways between stacked components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar integration to three-dimensional stacked architecture. Memory dies and logic dies are arranged vertically in multiple layers, utilizing the vertical dimension to achieve high integration density. Through-vias extend vertically through the stacked structure, providing electrical connectivity across different layers without compromising routability within each die layer.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If chiplet form factor is used, then manufacturing compatibility is improved, but device complexity increases

Engineering Contradiction:
Improvemanufacturing compatibilityVSAvoidstructural complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The semiconductor device is segmented into multiple chiplets including memory dies and logic dies that can be independently manufactured using existing fabrication processes. Each chiplet is fabricated separately on its own substrate, allowing compatibility with current manufacturing capabilities while enabling complex overall device functionality through the combination of multiple simpler components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple chiplets are nested vertically in a stacked configuration, with memory dies and logic dies arranged in layers. Smaller chiplets are positioned on top of larger substrates, creating a nested three-dimensional structure. Through-vias penetrate through the nested layers to establish electrical connections, managing structural complexity through organized vertical integration.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentUS20250357332A1Semiconductor device and methods of manufacturing the same
Publication Date: 2025.11.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250357332A1 patent drawing
  • US20250357332A1 patent drawing
  • US20250357332A1 patent drawing

AI summary

A semiconductor device includes a first tier and a second tier. The first tier includes a semiconductor die, where the semiconductor die includes a plurality of first connecting structures distributed over a non-active side of the semiconductor die. The second tier is disposed over the first tier and includes a memory die, the memory die includes a plurality of second connecting structures distributed over an active side of the memory die. The plurality of first connecting structures are connected to the plurality of second connecting structures in a one-to-one configuration, and the first tier is electrically coupled to the second tier.