Stacked Diode Over Lateral Bipolar Transistor for RF ESD Protection

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Solution Overview

Problem

Integrated circuits (ICs) are vulnerable to electrostatic discharge (ESD) which can affect their reliability, and in RF circuits, large voltage swings can damage p-n junctions, limiting voltage scaling and distorting harmonics in ESD protective structures.

Innovation Solution

A structure comprising a lateral bipolar transistor within a monocrystalline semiconductor, an insulator layer, and a diode in a polycrystalline semiconductor, where the diode's cathode is coupled to a well defining an emitter or collector terminal of the lateral bipolar transistor, providing enhanced ESD protection with reduced surface area and capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional ESD protective structures with multiple interconnected diodes are used, then ESD protection function is provided, but capacitance increases and harmonics distortions occur

Engineering Contradiction:
ImproveESD protection functionVSAvoidcapacitance and harmonics distortions
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent transitions from a planar arrangement of multiple diodes to a vertical stacked configuration where a diode is positioned directly over a lateral bipolar transistor. This dimensional change reduces the horizontal footprint and minimizes parasitic capacitance while maintaining ESD protection functionality through the vertical current path.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The diode structure is nested over the lateral bipolar transistor, with the diode's active region positioned above the transistor's active region. This nested configuration allows the ESD protection device to occupy minimal space while the underlying transistor provides additional protection mechanisms, creating a compact multi-functional structure.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If ESD protective structures are implemented in RF circuits, then protection against electrostatic discharge is provided, but large voltage swings damage p-n junctions and limit voltage scaling

Engineering Contradiction:
Improveprotection against electrostatic dischargeVSAvoiddamage to p-n junctions from large voltage swings
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent modifies the electrical parameters of the ESD protection structure by using a lateral bipolar transistor with specific doping configurations and junction depths. These parameter changes enable the structure to withstand large voltage swings in RF circuits without damaging the p-n junctions, while maintaining effective ESD protection capability.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If multiple interconnected diodes are used for ESD protection, then ESD protection is achieved, but surface area increases

Engineering Contradiction:
ImproveESD protectionVSAvoidsurface area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent employs a vertical stacked architecture where the diode is positioned over the lateral bipolar transistor in the vertical dimension rather than spreading multiple diodes across the horizontal plane. This dimensional reorganization dramatically reduces the surface area occupied by the ESD protection structure while maintaining its protective function.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS12205943B2Integrated circuit structure with diode over lateral bipolar transistor
Publication Date: 2025.01.21 GLOBALFOUNDRIES US INC
  • US12205943B2 patent drawing
  • US12205943B2 patent drawing
  • US12205943B2 patent drawing

AI summary

Embodiments of the disclosure provide an integrated circuit (IC) structure with a diode over a lateral bipolar transistor. A structure according to the disclosure may include a lateral bipolar transistor within a monocrystalline semiconductor over a substrate. An insulator layer is over a portion of the monocrystalline semiconductor. A diode is within a polycrystalline semiconductor on the insulator layer. A cathode of the diode is coupled to a first well within the monocrystalline semiconductor. The first well defines one of an emitter terminal and a collector terminal of the lateral bipolar transistor.