Stacked Gauge Pressure Sensor for Accurate Membrane Stress Detection
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Solution Overview
Problem
Conventional pressure sensors with stacked detection units face issues with detection accuracy due to inconsistent distances to detection units, leading to unreliable signal outputs.
Innovation Solution
The pressure sensor design includes a lamination structure where the distance from the membrane surface to the detection units is precisely controlled within 30 µm, utilizing thin film methods for gauge layers and insulating layers to ensure similar stress detection by multiple units, with a comparison or switching mechanism to enhance accuracy and redundancy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple detection units are stacked on rigid plates, then reliability is improved through redundancy, but detection accuracy deteriorates due to inconsistent distances to detection units
Solution Approach 1:
The sensor is divided into multiple detection units stacked in the lamination direction, each capable of independent pressure detection. This segmentation allows redundancy for reliability while maintaining consistent detection characteristics through controlled positioning.
Solution Approach 2:
The distance parameter from the membrane surface to each detection unit is precisely controlled to be within 30 μm. By standardizing this critical parameter across all detection units, the patent ensures consistent stress detection while maintaining the benefits of multiple stacked units for reliability.
2Ease of manufacture
If detection units are formed on rigid plates without considering distances, then manufacturing is simplified, but detection accuracy deteriorates due to variable stress detection
Solution Approach 1:
The patent specifies a critical parameter range (distance within 30 μm) that balances manufacturing feasibility with detection accuracy. This parameter control ensures that detection units are close enough to the membrane for accurate stress detection while remaining manufacturable through standard lamination processes.
Solution Approach 2:
Insulating layers with controlled thickness serve as intermediaries between the membrane and detection units, and between stacked detection units. These intermediary layers enable precise distance control and electrical isolation, facilitating both accurate detection and straightforward manufacturing.
3Stability of the object's composition
If gauge layers and insulating layers are formed thicker, then manufacturing robustness is improved, but sensor size increases and detection accuracy deteriorates
Solution Approach 1:
The patent optimizes the thickness parameters of gauge layers and insulating layers to achieve a balance between robustness and accuracy. By controlling these parameters within specific ranges, the patent ensures sufficient structural integrity for manufacturing while maintaining thin enough dimensions for accurate pressure detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves detection accuracy by ensuring similar stress detection across units, allows easy failure detection, reduces sensor size and cost, and enhances durability through redundancy.
Implementation Method 1
A pressure sensor is known that detects a distortion of a membrane (also referred to as a diaphragm) by resistance change using a piezoresistive effect.
Data Source
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AI summary
[Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22, an intermediate insulation layer 50 which is formed on the first gauge layer 40, and a second gauge layer 60 which is formed on the intermediate insulation layer 50. The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 µm.