3D Stacked Memory Cell Mat with Mid-Point Contacts
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Solution Overview
Problem
Current memory devices face challenges in increasing the number of memory cells per cell mat due to line resistance and voltage drop issues, limiting the size and integration of semiconductor memory units.
Innovation Solution
The semiconductor memory unit is designed with vertically stacked planes, where each plane includes cell mats with lower and upper lines intersecting at variable resistance elements, and contacts positioned at middle portions to reduce line resistance and enhance integration, allowing for more memory cells and a smaller device size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the number of memory cells per cell mat is increased, then the integration density is improved, but the line resistance and voltage drop increase
Solution Approach 1:
The patent transitions from a two-dimensional planar cell mat structure to a three-dimensional stacked structure with multiple planes (first plane, second plane, third plane) vertically arranged. This dimensional change allows memory cells to be organized in multiple layers, increasing the number of accessible memory cells while maintaining shorter current paths within each plane, thereby reducing line resistance and voltage drop effects.
Solution Approach 2:
The cell mat is divided into multiple separate planes stacked vertically, with each plane containing a subset of memory cells. This segmentation allows each plane to have its own dedicated lower lines and upper lines, distributing the current load and reducing the overall line resistance. The segmented structure also enables better voltage distribution across the memory array.
2Area of stationary object
If the size of the memory unit is reduced, then the device integration is improved, but the line resistance increases
Solution Approach 1:
By stacking multiple planes vertically, the patent reduces the horizontal footprint of the memory unit while maintaining adequate line lengths for reliable operation. The vertical stacking allows the memory array to fit in a smaller planar area without proportionally increasing line resistance, as each plane can be optimized independently for its line dimensions.
Solution Approach 2:
Each plane in the stacked structure can have locally optimized line dimensions and contact configurations tailored to its specific requirements. This allows different planes to have different line widths, lengths, or contact positions, enabling each local region to achieve optimal resistance characteristics while contributing to the overall compact structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces line resistance and voltage drop, enabling a higher density of memory cells and improved performance characteristics, thus increasing the degree of integration and reducing the size of the memory unit.
Implementation Method 1
a tth cell mat of a tth plane includes tth lower lines extending in a first direction, tth upper lines disposed over the tth lower lines and extending in a second direction crossing the first direction, and tth variable resistance elements positioned at cross points between the tth lower lines and the tth upper lines
Data Source
AI summary
An electronic device includes a semiconductor memory. The semiconductor memory includes a plurality of planes vertically stacked over a substrate. Each plane includes one or more cell mats. Each cell mat includes lower lines, upper lines crossing the lower lines, and variable resistance elements positioned in intersection regions of the lower lines and the upper lines, respectively. Lower contacts are coupled to the lower lines, respectively, and, in a plan view, overlap with a boundary region between half of the upper lines and the other half number of the upper lines. Upper contacts are coupled to the upper lines, respectively, and overlap with a boundary region between a half number of the lower lines and the other half number of the lower lines. One cell mat of an upper plane is vertically stacked over a lower plane to overlap with two adjacent cell mats of the lower plane.


