Stacked Micro-Gyroscope Coupling Springs
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Solution Overview
Problem
Generic micro-gyroscopes require a large installation space due to the need for multiple sensor devices, which complicates data capture and increases the size of the device.
Innovation Solution
A micro-gyroscope design with two sensor devices disposed parallel to each other and connected by a coupling spring, allowing synchronous operation and deflection of drive masses, enabling compact construction and redundant measurement verification without requiring additional installation space outside the X-Y plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple sensor devices are disposed adjacent to each other on the substrate, then reliable data capture and redundant measurement are achieved, but the installation space increases
Solution Approach 1:
The patent transitions from a two-dimensional arrangement of sensor devices on the substrate to a three-dimensional configuration by stacking sensor devices vertically along the Z-axis. Multiple sensor devices are positioned at different heights (first sensor device at lower Z-position, second sensor device at higher Z-position), enabling redundant measurement capability while maintaining a compact footprint on the substrate.
2Reliability
If two sensor devices are disposed adjacent to each other, then redundant measurement results are obtained, but the device complexity increases
Solution Approach 1:
The patent combines multiple sensor devices into a single integrated micro-gyroscope unit with shared structural elements. The first and second sensor devices share common anchors, coupling springs, and drive elements, merging their functions into one cohesive device that provides redundant measurement without requiring separate independent sensor systems.
3Area of stationary object
If sensor devices are stacked vertically, then installation space is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The patent employs asymmetric spring elements (coupling springs and anchor springs) with specific geometric configurations to accommodate the vertical stacking arrangement. These springs are designed with particular lengths, orientations, and attachment points that facilitate precise vertical positioning of sensor devices while compensating for manufacturing tolerances through their elastic properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compact design allows for reliable and redundant measurement results with reduced installation space, enhancing the accuracy and robustness of rotation rate detection around the Z-axis while maintaining a low profile.
Implementation Method 1
The drive masses of the first and the second sensor device, referred to below as the first and second drive masses, are connected to each other by means of a coupling spring
Implementation Method 2
The drive mass is mounted linearly displaceably in the direction of an X-axis, and rigidly in the direction of a Y-axis and a Z-axis, by means of at least one anchor spring disposed between the anchor and the drive mass
Implementation Method 3
A deflection of the sensor mass in the direction of the Y-axis is detected by sensor elements
Data Source
AI summary
A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.