Stacked Non-Volatile Memory Device With Intersecting Electrodes

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Solution Overview

Problem

Non-volatile memory devices with multi-layer structures face challenges in connecting and selecting memory cells, leading to increased manufacturing costs and complexity, while conventional single-layer structures struggle to meet high-capacity data processing demands.

Innovation Solution

A non-volatile memory device with a stacked structure featuring intersecting electrodes and data storage layers, where the electrodes include conductive and semiconductor layers forming diodes, allowing for efficient data storage and easy integration, along with a method of fabricating these devices that includes forming semiconductor layers and dielectric layers to facilitate high-capacity data storage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a multi-layer structure is used to increase integration capacity, then data storage capacity is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvedata storage capacityVSAvoidstructure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent transitions from conventional planar single-layer memory structures to a three-dimensional stacked multi-layer architecture. Memory cells are arranged vertically across multiple layers, with word lines extending in the first direction and bit lines in the second direction, creating a spatial matrix that dramatically increases storage capacity within the same footprint. This dimensional transformation allows efficient addressing and selection of individual cells through the layer stack.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The memory device is divided into multiple discrete layers, each containing arrays of memory cells formed by intersecting word lines and bit lines. Each layer can be independently addressed and accessed, allowing parallel operation and reducing the complexity of any single layer while maintaining high overall capacity. The segmented structure enables modular manufacturing and testing.

Inventive Principle:
Principle #1Segmentation

2Productivity

If a multi-layer structure is used to increase integration, then productivity is improved, but ease of manufacture deteriorates

Engineering Contradiction:
Improveintegration efficiencyVSAvoidmanufacturing difficulty
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

Semiconductor layers are formed to extend beyond the edges of the first electrode in advance, creating preliminary contact regions that simplify subsequent fabrication steps. This preliminary extension ensures proper electrical connections are established before final assembly, reducing manufacturing complexity despite the multi-layer structure.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent employs a nested structure where semiconductor layers are positioned within and around electrode structures across multiple layers. The semiconductor layers extend from lower layers into upper layers, creating integrated contact regions that are embedded within the stacked architecture. This nesting approach consolidates multiple functions into unified structures, simplifying the manufacturing process.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If semiconductor layers extend beyond electrode edges, then electrical connection is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidlayer alignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The semiconductor layers exhibit different properties in different regions: in the extended regions beyond electrode edges, they provide robust electrical contact with larger tolerance margins, while in the regions aligned with electrode intersections, they form precise memory cell structures. This local differentiation allows the design to accommodate varying precision requirements across different functional zones.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS8120006B2Non-volatile memory device
Publication Date: 2012.02.21 SAMSUNG ELECTRONICS CO LTD
  • US8120006B2 patent drawing
  • US8120006B2 patent drawing
  • US8120006B2 patent drawing

AI summary

Provided is a non-volatile memory device having a stacked structure that is easily highly integrated and a method of economically fabricating the non-volatile memory device. The non-volatile memory device may include at least one first electrode and at least one second electrode that cross each other. At least one data storage layer may be disposed on a section where the at least one first electrode and the at least one second electrode cross each other. The at least one first electrode may include a first conductive layer and a first semiconductor layer.