Stacked Package Interconnects via Additive Manufacturing

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current semiconductor packaging technologies face challenges in small form factor packages and systems-in-packages, particularly with traditional package-on-package approaches that are costly and inefficient, and in thermal management using polymer thermal interface materials, which lack the necessary thermal conductivity and adhesion to silicon surfaces.

Innovation Solution

The use of high throughput additive manufacturing for creating substrate integrated posts, integrated heat spreaders, and highly conductive layers on dies, along with additive deposition of interconnects between stacked packages and dies, enables cost-effective and efficient thermal management and mechanical coupling, allowing for the use of solder thermal interface materials and other high conductivity materials without the need for traditional wafer-level backside metallization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional package-on-package approach with solder-filled through-mold vias is used, then electrical connections between stacked packages are achieved, but the manufacturing process is complex and throughput is slow due to ball drop requirements

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidmanufacturing throughput
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent replaces the mechanical ball drop and reflow process with a direct additive manufacturing process that deposits conductive material through deposited layers and sintering, eliminating the need for spherical solder balls and complex assembly equipment while achieving reliable electrical connections

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the manufacturing parameters from traditional soldering temperatures and processes to additive manufacturing parameters including material deposition, layer sintering at controlled temperatures, and in-situ formation of interconnects, enabling higher throughput and flexibility

Inventive Principle:
Principle #35Parameter changes

2Reliability

If copper-plated through-mold vias are used for electrical connections, then electrical connectivity is achieved, but multiple resist lamination steps, lithography, and time-consuming plating steps are required increasing cost and reducing throughput

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces the multi-step electroplating process with additive manufacturing that directly deposits conductive material and forms vias through layer-by-layer construction followed by sintering, eliminating resist lamination, lithography, and plating steps

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent performs preliminary formation of via structures and conductive pathways during the additive manufacturing process itself, rather than requiring subsequent plating steps, by depositing and sintering conductive material in the desired locations before final assembly

Inventive Principle:
Principle #10Preliminary action

3Reliability

If discrete peripheral interposers with through vias are used, then electrical connections are achieved, but the overall package size increases and additional pick and place assembly steps are required

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidpackage footprint
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent merges the interposer function with the substrate by integrating through-substrate vias and conductive pathways directly into the substrate structure, eliminating the need for separate discrete interposer components and reducing overall package footprint

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate is designed to perform multiple functions including mechanical support, electrical interconnection, and thermal management, replacing the specialized function of discrete interposers and reducing the number of components required

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Ease of manufacture

If polymer thermal interface material is used, then ease of assembly is achieved, but thermal conductivity is insufficient for high power segments

Engineering Contradiction:
Improveassembly easeVSAvoidthermal conductivity
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent uses composite thermal interface materials that combine polymer matrix with high thermal conductivity fillers such as metal particles or ceramic materials, achieving both ease of assembly and high thermal conductivity for high power applications

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the thermal interface material properties by selecting materials with optimized thermal conductivity parameters and adhesion characteristics, transitioning from standard polymer TIM to high-performance composite TIM capable of withstanding high power densities

Inventive Principle:
Principle #35Parameter changes

5Temperature

If solder thermal interface material is used to achieve higher thermal conductivity, then thermal performance is improved, but adhesion to bare silicon is poor requiring die backside metallization which increases complexity and cost

Engineering Contradiction:
Improvethermal conductivityVSAvoidbackend fabrication complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent performs preliminary deposition of adhesion-promoting metallization layers on the die backside during the additive manufacturing process or as a preliminary step, enabling direct solder TIM attachment without requiring complex wafer-level backside metallization

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces an intermediary adhesion layer or surface treatment that mediates between the solder thermal interface material and the silicon surface, providing both thermal conductivity and adhesion without requiring full backside metallization

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances thermal performance, reduces manufacturing costs, and improves reliability by providing flexible and customizable solutions for thermal interface materials and mechanical coupling, addressing the limitations of traditional methods in small form factor packages and systems-in-packages.

Implementation Method 1

high throughput additive manufacturing for creating substrate integrated posts, integrated heat spreaders, and highly conductive layers on dies

Methodology Applied
Scientific EffectAdditive manufacturing: 3D Printing

Implementation Method 2

additive deposition of interconnects between stacked packages and dies

Methodology Applied
Scientific EffectAdditive deposition: 3D Printing

Implementation Method 3

highly conductive layers deposited on dies using high throughput additive deposition

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11227859B2Stacked package with electrical connections created using high throughput additive manufacturing
Publication Date: 2022.01.18 INTEL CORP
  • US11227859B2 patent drawing
  • US11227859B2 patent drawing
  • US11227859B2 patent drawing

AI summary

A device package and a method of forming the device package are described. The device package includes one or more dies disposed on a first substrate. The device packages further includes one or more interconnects vertically disposed on the first substrate, and a mold layer disposed over and around the first die, the one or more interconnects, and the first substrate. The device package has a second die disposed on a second substrate, wherein the first substrate is electrically coupled to the second substrate with the one or more interconnects, and wherein the one or more interconnects are directly disposed on at least one of a top surface of the first substrate and a bottom surface of the second substrate without an adhesive layer. The device package may include one or more interconnects having one or more different thicknesses or heights at different locations on the first substrate.