Stacked Semiconductor Package Thermal Control via Through Electrodes

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Solution Overview

Problem

Existing semiconductor packages face challenges in accurately measuring and controlling temperature variations, which affect performance and reliability, especially in compact electronic devices with high integration and driving frequencies.

Innovation Solution

A semiconductor package design that includes temperature sensors, power control units, and clock control elements connected via through electrodes to manage thermal management by adjusting power and clock signals based on measured temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If temperature sensors and control units are added to the semiconductor package, then thermal management capability is improved, but device complexity increases

Engineering Contradiction:
Improvethermal management capabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into the lower semiconductor chip: temperature sensing, power control, clock control, and signal routing are all integrated into a single chip that also serves as a structural support element. This merging approach adds thermal management capabilities while minimizing the increase in overall device complexity by utilizing existing structural components for multiple purposes.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The lower semiconductor chip is designed with multi-functionality, serving both as a structural support element and as a control unit that performs temperature sensing, power control, and clock control. This universal design allows the same component to fulfill multiple roles, improving thermal management without proportionally increasing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Stability of the object's composition

If power control and clock control are implemented based on temperature, then operating state stability is improved, but control system complexity increases

Engineering Contradiction:
Improveoperating state stabilityVSAvoidcontrol system complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent implements a feedback mechanism where temperature sensors continuously monitor the temperature of upper semiconductor chips and provide this information to the lower semiconductor chip. Based on this feedback, the lower chip automatically adjusts power supply and clock signals to maintain stable operating conditions, preventing thermal runaway and ensuring reliable operation.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The lower semiconductor chip autonomously performs temperature monitoring, power control, and clock control without requiring external intervention. The system self-regulates by using its own temperature sensing capabilities to control its own power and clock signals, simplifying the overall control architecture while maintaining operating stability.

Inventive Principle:
Principle #25Self-service

3Measurement precision

If temperature measurement accuracy is increased, then thermal control precision is improved, but measurement system complexity increases

Engineering Contradiction:
Improvetemperature measurement accuracyVSAvoidmeasurement system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent places temperature sensors in specific locations where they can directly measure the temperature of upper semiconductor chips. By positioning sensors locally near the heat-generating components and using dedicated temperature sensing elements within the lower chip, the system achieves high measurement accuracy without requiring complex distributed sensing networks.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances performance and reliability by controlling temperature fluctuations, maintaining optimal operating states, and reducing power consumption in semiconductor packages.

Implementation Method 1

a plurality of temperature sensors configured to sense temperatures of the first and second upper semiconductor chips

Methodology Applied
Scientific EffectTemperature sensing: Thermistor

Data Source

PatentUS12422907B2Semiconductor package and thermal management method thereof
Publication Date: 2025.09.23 SAMSUNG ELECTRONICS CO LTD
  • US12422907B2 patent drawing
  • US12422907B2 patent drawing
  • US12422907B2 patent drawing

AI summary

Disclosed are semiconductor packages and thermal management methods thereof. The semiconductor package includes an upper semiconductor chip; and a lower semiconductor chip connected via a plurality of through electrodes to the upper semiconductor chip. The lower semiconductor chip may include at least one temperature sensor configured to sense a temperature of the upper semiconductor chip, a power control unit connected to the at least one temperature sensor, a power switching element connected to at least a first one of the plurality of through electrodes, and a clock control element connected to at least a second one of the plurality of through electrodes.