Stacked Semiconductor Package Layout for Reduced TSV Pitch

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Solution Overview

Problem

The challenge in high bandwidth memory (HBM) devices is the difficulty in reducing the pitch of through silicon vias (TSVs) due to the space occupied by I/O driver circuits, limiting the number of input/output channels.

Innovation Solution

A semiconductor package design with alternating groups of through electrodes on each chip, where only one group is connected to I/O circuitry, allowing for a staggered I/O pattern and reducing pitch between TSVs, thereby increasing the number of TSVs and implementing a broadband interface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the pitch of through silicon vias is reduced to increase the number of I/O channels, then the data transmission capacity is improved, but the space occupied by I/O driver circuits makes it difficult to reduce the pitch

Engineering Contradiction:
Improvenumber of I/O channelsVSAvoidspace occupied by I/O driver circuits
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The through electrodes are divided into two distinct groups: a first group electrically connected to I/O circuitry and a second group not connected to I/O circuitry. This segmentation allows the I/O driver circuits to be positioned only around the first group of through electrodes, freeing up space and enabling reduced pitch between through electrodes overall, thereby increasing the total number of I/O channels without proportionally increasing the space occupied by driver circuits.

Inventive Principle:
Principle #1Segmentation

2Length of moving object

If alternating groups of through electrodes are used with staggered I/O pattern, then the pitch between TSVs is reduced, but the device complexity increases

Engineering Contradiction:
Improvepitch between TSVsVSAvoiddevice complexity
Core Design Contradiction:
Length of moving objectVSDevice complexity

Solution Approach 1:

The patent employs an asymmetric arrangement where alternating groups of through electrodes (first and second groups) have different electrical connection configurations. The first group connects to I/O circuitry while the second group does not, creating a staggered I/O pattern. This asymmetric design enables reduced pitch between through electrodes by eliminating the need for I/O driver circuits around every through electrode, thereby reducing the effective pitch requirement while managing device complexity through functional differentiation.

Inventive Principle:
Principle #4Asymmetry

Data Source

PatentUS12588551B2Semiconductor package and method of manufacturing the semiconductor package
Publication Date: 2026.03.24 SAMSUNG ELECTRONICS CO LTD
  • US12588551B2 patent drawing
  • US12588551B2 patent drawing
  • US12588551B2 patent drawing

AI summary

A semiconductor package includes a semiconductor package includes first, second, third and fourth semiconductor chips sequentially stacked on one another. Each of the first, second, third and fourth semiconductor chips includes a first group of bonding pads and a second group of bonding pads alternately arranged in a first direction and input/output (I/O) circuitry selectively connected to the first group of bonding pads respectively. Each of the first, second and third semiconductor chips includes a first group of through electrodes electrically connected to the first group of bonding pads and a second group of through electrodes electrically connected to the second group of bonding pads.