Stacked Prism Pitch Reducer for Maskless Exposure
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Solution Overview
Problem
Existing maskless exposure methods for large substrates face challenges in achieving high-precision pattern drawing over large areas while maintaining low cost and throughput, with previous solutions requiring numerous parts and being expensive due to the need for improved beam parallelism and careful handling of thin prisms.
Innovation Solution
A device comprising a first and second transparent prism member with a groove for total reflection, allowing for reduced parts and improved beam parallelism, enabling easier handling and operation by stacking them in direct contact to change the pitch between light beam axes without altering beam diameter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a beam-pitch-reducing means without beam diameter change is used, then the pitch between light beam axes is reduced, but the number of parts increases and the structure becomes expensive
Solution Approach 1:
The patent combines two separate prism members into a single integrated prism structure. The first and second prism members are stacked in direct contact with each other, forming one unified optical component that reduces the pitch between light beam axes. This merging eliminates the need for separate beam-pitch-reducing components while maintaining the desired pitch reduction effect.
Solution Approach 2:
The patent introduces a groove in the z-direction (perpendicular to the x-y cross section) of one of the prism members. This groove creates total reflection for light attempting to enter it, effectively utilizing the third dimension to control light paths and achieve pitch reduction without requiring additional separate components in the x-y plane.
2Manufacturing precision
If the parallelism of beams is improved, then beam quality is enhanced, but the structure becomes expensive and handling becomes difficult
Solution Approach 1:
By stacking the first and second prism members in direct contact to form an integrated structure, the patent improves beam parallelism through a unified optical path while maintaining a manageable overall size. The direct contact between prisms ensures precise alignment and parallelism without requiring excessively thin individual prisms that would be difficult to handle.
Solution Approach 2:
The groove structure in the z-direction provides total reflection for stray light, improving beam parallelism and quality. By utilizing the vertical dimension rather than requiring larger lateral dimensions, the patent achieves improved parallelism without significantly increasing the horizontal footprint or making the component unwieldy to handle.
3Length of moving object
If thin prisms are used, then the pitch between light beam axes is reduced, but careful handling is required due to small thickness
Solution Approach 1:
The patent stacks two prism members of moderate thickness in direct contact with each other to achieve the desired pitch reduction. This approach avoids using a single extremely thin prism that would be fragile and difficult to handle, while still achieving the compact pitch reduction effect through the combined structure.
Solution Approach 2:
By introducing the groove in the z-direction and utilizing vertical stacking, the patent achieves pitch reduction through a combination of moderate-thickness prisms rather than relying on a single thin prism. This dimensional approach maintains structural integrity and ease of handling while achieving the required pitch compression.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the number of parts, enhances workability, and improves beam parallelism, leading to improved handling and cost-effectiveness in maskless substrate exposure, enabling efficient and precise pattern formation on large substrates.
Implementation Method 1
The first transparent member and the second transparent member are stacked in direct contact with each other with the groove located on an inner side so that light trying to enter the groove is subjected to total reflection by the groove
Data Source
AI summary
A parallel glass which is a prism having a parallelogram-shaped cross section in an x-y direction, and parallel glasses which are prisms having a parallelogram-shaped cross section in the x-y direction and each include grooves formed in one surface in a z direction perpendicular to the x-y direction, are stacked in direct contact with each other such that the grooves are located on the inside, and light trying to enter the grooves is subjected is total reflection, thereby changing incident parallel beams with a pitch of 13 mm into emergent parallel beams with a pitch of 1 mm.