Stacked Quartz Sensor for Temperature-Induced Drift

The patent changes the physical parameters of the quartz crystal by using different cut orientations (X-cut, Y-cut, Z-cut) with specific thermal expansion coefficients. By selecting and combining crystal cuts with appropriate thermal expansion characteristics, the sensor maintains high stiffness while compensating for temperature-induced stress, thereby resolving the contradiction between mechanical strength and measurement precision.

The patent employs a composite structure combining multiple quartz crystal plates with different cut orientations (X-cut, Y-cut, Z-cut) and different thermal expansion coefficients. This composite arrangement allows the sensor to leverage the high stiffness of quartz crystal while the diverse thermal expansion properties of different cuts compensate for temperature effects, simultaneously achieving both mechanical strength and temperature stability for accurate detection.

The patent utilizes parameter changes by selecting quartz crystal cuts with specific thermal expansion coefficients (X-cut, Y-cut, Z-cut) to match or compensate for the thermal expansion of surrounding components. This parameter optimization allows the sensor to maintain its wide dynamic range while minimizing thermal expansion mismatches that cause false charge generation, thereby resolving the contradiction between adaptability and harmful factor reduction.

The patent converts the potentially harmful effect of thermal expansion into a beneficial compensation mechanism. By deliberately selecting quartz crystal cuts with specific thermal expansion coefficients that differ from standard cuts, the patent creates a compensation effect where the thermal expansion of one crystal cut offsets the thermal contraction of another, transforming the harmful thermal effect into a benefit that eliminates false charge while preserving the wide dynamic range.

The patent applies composite material principles by combining multiple quartz crystal plates with different cut orientations (X-cut, Y-cut, Z-cut) in a stacked configuration. This composite structure, while more complex than a single plate, provides temperature compensation through the different thermal expansion coefficients of each cut, thereby improving charge detection accuracy without excessive complexity increase.

The patent segments the piezoelectric element into multiple quartz crystal plates with different cut orientations rather than using a single plate. Each segment (crystal plate) has specific thermal expansion properties, and their combined effect compensates for temperature-induced stress. This segmentation approach improves measurement precision while keeping each individual segment relatively simple in structure.