Stacked Resistive Memory Cells for High Integration Density

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Solution Overview

Problem

Existing electron charge control-based memory devices face limitations in increasing memory capacity and integration density, necessitating the development of next-generation memory devices with high capacity, speed, and low power consumption, such as resistive memory devices.

Innovation Solution

A stack type resistive memory device is manufactured using a semiconductor substrate with multiple resistive memory cells, each comprising a switching transistor and a resistive device layer, connected to a common source line and bit line, allowing for high integration density without being restricted by critical dimensions, and a method involving multiple layers and insulating layers to form these components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If electron charge control-based memory devices are used, then memory capacity can be increased, but integration density reaches physical limits

Engineering Contradiction:
Improvememory capacityVSAvoidintegration density
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent transitions from planar memory cell arrangement to a three-dimensional stacked architecture. Multiple memory cells are vertically stacked above each other, utilizing the vertical dimension to increase integration density. This allows more memory cells to be packed into the same footprint area without increasing lateral device complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If more memory cells are integrated in confined space, then memory capacity increases, but manufacturing precision requirements increase

Engineering Contradiction:
Improveintegration densityVSAvoidcritical dimensions
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The memory device is segmented into multiple discrete stacked layers, each containing memory cells with their own switching transistors and resistive devices. This segmentation allows each layer to be manufactured and assembled independently, reducing the cumulative precision requirements compared to a monolithic structure

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS9018610B2Resistive memory device and method of manufacturing the same
Publication Date: 2015.04.28 SK HYNIX INC
  • US9018610B2 patent drawing
  • US9018610B2 patent drawing
  • US9018610B2 patent drawing

AI summary

A resistive memory device capable of improving an integration density is provided. The resistive memory device includes a semiconductor substrate, a plurality of resistive memory cells configured to be stacked on the semiconductor substrate and insulated from one another, where each of the plurality of resistive memory cells includes a switching transistor and a resistive device layer electrically connected to the switching transistor, a common source line electrically connected to the plurality of stacked resistive memory cells, and a bit line electrically connected to the plurality of stacked resistive memory cells and being insulated from the common source line.