Stacked Balanced Resonators for Low Anchor Loss
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Anchor loss in mechanical resonators is difficult to control, which limits the quality factor (Q-factor) and thereby the performance of gyroscopes and other devices, as energy dissipation occurs due to wave propagation into the support structure.
Innovation Solution
A stacked resonator design with two resonant masses and support structures, where each resonant mass is movably coupled to the support structure via elastic members at anchor points, allowing for reduced energy transfer between the resonators and minimizing anchor loss by maintaining opposing motion at the bonded areas, thereby maximizing the Q-factor.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If traditional single resonator design is used, then device structure is simple, but anchor loss is high and Q-factor is limited
Solution Approach 1:
The resonator is divided into two separate resonant masses (first and second resonant masses) that are stacked and bonded together. Each resonant mass is independently coupled to its own support structure via elastic members, allowing separate optimization of each resonator's anchor loss characteristics while maintaining overall system functionality.
Solution Approach 2:
Two resonant masses are stacked and bonded together to form a combined resonator system. The bonding interface between the two resonant masses creates a shared anchor point where opposing motions can cancel each other, reducing net energy transfer to the support structure and minimizing anchor loss.
2Reliability
If resonator thickness is increased to reduce noise and improve robustness, then device robustness improves, but anchor loss and energy dissipation increase
Solution Approach 1:
The two resonant masses are configured to move in opposite directions (180 degrees out-of-phase) at their bonding interface. This counterbalancing motion creates opposing forces that cancel each other out, reducing net energy transfer to the anchor points and support structures, thereby reducing anchor loss even as individual resonator thickness increases for robustness.
3Stability of the object's composition
If resonant masses are coupled rigidly to support structures, then structural stability is high, but energy transfer to support structure increases causing high anchor loss
Solution Approach 1:
Elastic members are used to couple each resonant mass to its support structure. These elastic members provide flexible, compliant connections that maintain structural stability while reducing rigid coupling between the resonant masses and support structures, thereby minimizing energy transfer and anchor loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The stacked resonator design effectively reduces anchor loss, enhancing the Q-factor and improving the performance of gyroscopes by maintaining vibrational energy within the resonators and increasing the thickness of resonators for reduced noise and increased robustness.
Implementation Method 1
each resonant mass is movably coupled by at least one elastic member at an anchor point to the support structure
Implementation Method 2
A first set of drive electrodes are disposed adjacent to the first resonant mass along a periphery of the first resonant mass. The first set of drive electrodes is configured to vibrate the first resonant mass
Implementation Method 3
maintaining opposing motion at the bonded areas, thereby maximizing the Q-factor
Data Source
AI summary
A resonator array comprises substantially paralleled first and second resonant layers having resonating masses. A first set of lateral drive electrodes cause the first resonating mass to vibrate along an axis in a first geometric plane. A second set of lateral drive electrodes cause the second resonating mass to vibrate along an axis in a second geometric plane in an opposite direction of the first resonating mass by about 180 degrees. Rotation in the system causes the masses to vibrate out-of-plane in opposite directions. The opposite vibrational directions of the first and second resonating masses produces a balanced system with small motion in a bonding area between the stacked resonators. As a result, there is minimal propagation of mechanical waves from the balanced system to a substrate resulting in lower anchor loss and a high Q-factor.