Stacked RF Amplifier Topology With Through-Die Vias to Cut Inductance

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Solution Overview

Problem

Conventional RF power amplifier devices face challenges in high-frequency applications due to excessive inductance from bond wires, which can lead to manufacturing costs and device failure issues, and performance degradation from proximity to ground planes, necessitating the development of alternative interconnect methods.

Innovation Solution

The implementation of integrated interconnect structures, including conductive via structures and passive devices like IPDs, which provide impedance matching and harmonic termination without wire bonds, allowing for stacked topologies and reduced parasitic induction, thereby minimizing inductance and capacitive coupling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If bond wires are used for interconnect, then electrical connection is achieved, but inductance increases and RF performance degrades

Engineering Contradiction:
ImproveRF performanceVSAvoidinductance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and eliminates the bond wire interconnect from the RF amplifier structure, replacing it with direct die-to-substrate bonding. This removes the source of parasitic inductance while maintaining electrical connection functionality through alternative pathways.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent transitions from planar interconnect (bond wires on surface) to vertical interconnect (through-silicon carbide vias penetrating the die thickness). This dimensional change enables direct electrical pathways that bypass the parasitic inductance associated with surface-mounted bond wires.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If bond wires are used for interconnect, then electrical connection is achieved, but manufacturing costs increase

Engineering Contradiction:
Improvedevice functionalityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent removes the bond wire component and associated wire-bonding manufacturing process, replacing them with direct die bonding techniques that eliminate material costs and complex assembly steps while maintaining device functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent combines the interconnect function with the die-substrate bonding process itself, eliminating the need for separate wire-bonding steps. The electrical connection is achieved as an integrated part of the mounting process rather than as a separate manufacturing operation.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If bond wires are used for interconnect, then electrical connection is achieved, but assembly time increases

Engineering Contradiction:
Improveelectrical connectionVSAvoidassembly time
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent merges the electrical interconnect function with the die mounting process, achieving both mechanical attachment and electrical connection in a single bonding operation. This eliminates the sequential steps of mounting followed by wire-bonding, thereby reducing total assembly time.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent incorporates interconnect pathways directly into the die and substrate structures before final assembly. The through-silicon carbide vias and contact pads are pre-formed during fabrication, so no additional interconnect formation is needed during the assembly process.

Inventive Principle:
Principle #10Preliminary action

4Reliability

If passive components are placed near ground plane, then impedance matching is achieved, but capacitive coupling increases and quality factor decreases

Engineering Contradiction:
Improveimpedance matchingVSAvoidcapacitive coupling
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent moves passive components from the planar domain near the ground plane to the vertical dimension by stacking them on top of the RF amplifier die. This spatial separation in the third dimension reduces parasitic capacitive coupling to the ground plane while maintaining impedance matching functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces the RF amplifier die itself as an intermediary substrate between the passive components and the ground plane. This intermediate layer provides electrical isolation and reduces direct capacitive coupling pathways while allowing impedance matching circuits to function effectively.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS11881464B2Stacked RF circuit topology using transistor die with through silicon carbide vias on gate and/or drain
Publication Date: 2024.01.23 MACOM TECH SOLUTIONS HLDG INC
  • US11881464B2 patent drawing
  • US11881464B2 patent drawing
  • US11881464B2 patent drawing

AI summary

A radio frequency (RF) power amplifier device package includes a substrate and a first die attached to the substrate at a bottom surface of the first die. The first die includes top gate or drain contacts on a top surface of the first die opposite the bottom surface. At least one of the top gate or drain contacts is electrically connected to a respective bottom gate or drain contact on the bottom surface of the first die by a respective conductive via structure. An integrated interconnect structure, which is on the first die opposite the substrate, includes a first contact pad on the top gate contact or the top drain contact of the first die, and at least one second contact pad connected to a package lead, a contact of a second die, impedance matching circuitry, and/or harmonic termination circuitry.