Microengineered Stacked Ring Electrode Assembly for Tapered Ion Paths
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Solution Overview
Problem
Existing miniature ion optical systems face challenges in fabricating complex structures below a certain size scale, particularly in providing curved or tapered ion paths, due to the limitations of conventional machining methods and the need for separate electrical connections, which become inconvenient as the system size reduces.
Innovation Solution
A microengineered miniature stacked ring electrode assembly is fabricated using planar processes, allowing for the formation of curved or tapered ion paths by etching and wafer bonding techniques, where electrodes are fabricated in two halves and assembled to form a sandwich structure with grooved features creating closed pupils, enabling operation as either RF or DC ion guides.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional machining methods are used to fabricate miniature ion optical systems, then manufacturing precision can be maintained, but device complexity increases and ease of manufacture deteriorates as size reduces
Solution Approach 1:
The patent replaces conventional mechanical machining methods with microfabrication techniques including photolithography, etching, and wafer bonding. These planar processes enable precise fabrication of complex three-dimensional electrode structures and ion paths at miniaturized scales without the limitations of traditional machining, thereby maintaining manufacturing precision while dramatically improving ease of manufacture
Solution Approach 2:
The patent transitions from two-dimensional planar electrode arrangements to three-dimensional stacked ring structures with curved and tapered ion paths. By utilizing vertical stacking and three-dimensional electrode geometries created through microfabrication, the system achieves complex ion optical functionality that cannot be realized with conventional planar machining methods
2Reliability
If separate electrical connections are provided for each electrode, then electrical connectivity is maintained, but device complexity increases as system size reduces
Solution Approach 1:
The patent integrates multiple electrode connections into a unified structure using bus bars that electrically connect multiple ring electrodes together. This merging of separate connection paths into consolidated conductive elements reduces the number of discrete connection points and simplifies the overall electrical architecture while maintaining reliable electrical connectivity to all electrodes
Solution Approach 2:
The bus bar structure serves multiple functions simultaneously: it provides electrical connectivity to multiple electrodes, acts as a mechanical support structure for the stacked rings, and defines the physical geometry of the ion guide. This multi-functionality reduces the number of separate components needed and simplifies the overall device structure
3Volume of moving object
If miniaturized ion optical systems are constructed, then system size is reduced, but manufacturing complexity increases due to curved or tapered ion paths
Solution Approach 1:
The patent incorporates curved and tapered ion path geometries directly into the mold or master structure used for replication. By pre-forming these complex three-dimensional features in the fabrication template before mass production, the complex geometries are replicated accurately across multiple devices without requiring complex post-processing or assembly operations
Solution Approach 2:
The patent divides the ion guide into a series of discrete stacked ring segments that can be independently fabricated using planar microfabrication processes and then assembled through wafer bonding. This segmentation allows complex three-dimensional ion paths to be constructed from simpler two-dimensional layers, making the manufacturing process more manageable while achieving the desired curved or tapered geometries
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the creation of compact, efficient ion guides with flexible ion paths and reduced complexity, facilitating the integration of ion optics and mass filters, while maintaining electrical connectivity and minimizing charging effects.
Implementation Method 1
A set of ring electrodes 101 is arranged at regular intervals along an axis, which serves as the axis of an ion beam 102. Alternate rings are connected together by bus bars 103a and 103b that are connected to a RF source 104, so that each alternate ring carries a voltage of opposite polarity.
Implementation Method 2
The motion of the ion beam in the resulting field may be divided into two components. The first is a fast-varying component due to the direct action of the alternating field, and the second is a slow-varying component due to an effective DC pseudopotential derived from the field. The second component acts to drive the ions towards the axis and provides the focusing exploited in beam concentrators and collision cells (Gerlich 2004).
Implementation Method 3
A microengineered miniature stacked ring electrode assembly is fabricated using planar processes, allowing for the formation of curved or tapered ion paths by etching and wafer bonding techniques
Implementation Method 4
A microengineered miniature stacked ring electrode assembly is fabricated using planar processes, allowing for the formation of curved or tapered ion paths by etching and wafer bonding techniques
Data Source
AI summary
Microengineered stacked ring electrode assemblies capable of acting as either RF or DC ion guides in an ion optical system, and method of fabricating same are described. The electrodes are fabricated using planar processing as sets of grooved, proud features formed in a layer of material lying on an insulating substrate. Two such structures are then stacked together to form a set of diaphragm electrodes with closed pupils. Arrangements for fabrication by patterning, etching and bonding are described, together with methods for tapering the electrode pupils or otherwise varying the ion path.