Stacked SAW Package With Conductive Frame for Heat Dissipation

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Solution Overview

Problem

Acoustic wave filters, particularly surface acoustic wave (SAW) filters, face limitations in thermal dissipation due to poor thermal conductivity of materials like lithium niobate and lithium tantalate, leading to power durability issues and potential device failure at high temperatures.

Innovation Solution

A packaged acoustic wave component is designed with a multi-layer piezoelectric substrate and a thermally conductive frame to direct heat generated by one SAW device to another, enhancing thermal dissipation and power durability by using a support layer with higher thermal conductivity than the piezoelectric layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If stacked SAW packages are used to reduce size, then device miniaturization is achieved, but thermal dissipation performance deteriorates due to lower thermal conductivity in upper wafer

Engineering Contradiction:
Improvedevice sizeVSAvoidthermal dissipation performance
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The piezoelectric substrate is segmented into multiple layers with different thermal conductivities. The first piezoelectric layer has higher thermal conductivity than the second piezoelectric layer, creating a thermal gradient that directs heat flow from the upper device to the lower device, thereby improving thermal dissipation while maintaining the compact stacked structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite material structure by combining piezoelectric layers with different thermal conductivities in a stacked configuration. This multi-layer composite approach enables differentiated thermal management where each layer contributes to overall heat dissipation performance while maintaining the necessary piezoelectric functionality

Inventive Principle:
Principle #40Composite materials

2Power

If high power applications are implemented, then device functionality is enhanced, but thermal stress increases leading to potential device failure

Engineering Contradiction:
Improvepower handling capabilityVSAvoiddevice reliability
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

Different regions of the device structure are assigned different thermal properties. The first piezoelectric layer is designed with higher thermal conductivity specifically to handle heat generation in high power applications, while the second layer maintains necessary piezoelectric characteristics. This localized optimization of thermal properties enables high power operation without compromising device reliability

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the temperature of the first acoustic wave device to below 100 degrees Celsius, preventing mechanical stress and failure, enabling high power applications while allowing for size reduction and improved thermal performance.

Implementation Method 1

a thermally conductive frame interposed between the first and second acoustic wave devices. The first multi-layer piezoelectric substrate is configured to direct heat generated by the first acoustic wave device to the second acoustic wave device by way of the thermally conductive frame to dissipate heat from the first acoustic wave device

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

A surface acoustic wave resonator can include an interdigital transductor electrode on a piezoelectric substrate. The surface acoustic wave resonator can generate a surface acoustic wave on a surface of the piezoelectric layer on which the interdigital transductor electrode is disposed

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20220158610A1Method of making a packaged acoustic wave devices with multi-layer piezoelectric substrate
Publication Date: 2022.05.19 SKYWORKS SOLUTIONS INC
  • US20220158610A1 patent drawing
  • US20220158610A1 patent drawing
  • US20220158610A1 patent drawing

AI summary

Aspects of this disclosure relate to a method of manufacturing a packaged acoustic wave component with two acoustic wave devices interconnected by a thermally conductive frame. The method includes providing a first acoustic wave device having a multi-layer piezoelectric substrate structure with a first piezoelectric layer disposed over a first support layer and an interdigital transducer electrode. The method further includes stacking the first acoustic wave device relative to a second acoustic wave device such that a thermally conductive frame extends between the first acoustic wave device and the second acoustic wave device. The thermally conductive frame provides a thermal path for heat dissipation from the first acoustic wave device to the second acoustic wave device.