Stacked Semiconductor Dice for High Density Memory

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Solution Overview

Problem

Semiconductor devices face challenges in increasing data storage density due to dense conductive lines causing capacitive loading and capacitive coupling, limiting further reduction in feature size and making it difficult to enhance data storage capacity.

Innovation Solution

The solution involves distributing memory device portions across multiple semiconductor dice in a stacked arrangement, with each die containing specific components like memory cells or support circuitry, and using different types of wafers to minimize parasitic capacitance and floating body effects, allowing for increased storage density within a given volume.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If features are shrunk to increase data storage capacity, then data storage density is improved, but capacitive loading and capacitive coupling increase causing poor device performance

Engineering Contradiction:
Improvedata storage capacityVSAvoiddevice performance
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent transitions from a two-dimensional planar arrangement of memory cells to a three-dimensional stacked arrangement using multiple semiconductor dies. By stacking dies vertically with memory cells distributed across different layers (first die containing first and second memory cells, second die containing third and fourth memory cells), the invention increases storage capacity while maintaining larger feature sizes and reducing capacitive coupling effects that plague planar designs.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If feature size is reduced to accommodate more memory cells, then data storage density is improved, but minimum achievable dimension is reached making further reduction unachievable

Engineering Contradiction:
Improvedata storage densityVSAvoidfeature dimension
Core Design Contradiction:
Quantity of substanceVSLength of moving object

Solution Approach 1:

The invention moves from scaling in the lateral plane to scaling in the vertical dimension by stacking multiple semiconductor dies. This allows continued increase in storage density without further reducing the already-minimal feature dimensions of transistors and conductive lines within each die.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The memory device is segmented into multiple separate semiconductor dies, each containing a portion of the total memory capacity. This segmentation allows each individual die to maintain larger, more manufacturable feature sizes while the aggregate stack provides the desired high storage density.

Inventive Principle:
Principle #1Segmentation

3Quantity of substance

If conductive lines are increased to accommodate additional memory cells, then data storage capacity is improved, but total number of conductive lines becomes dense causing capacitive loading and capacitive coupling

Engineering Contradiction:
Improvedata storage capacityVSAvoidconductive line density
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

By dividing the memory device into multiple separate dies, the patent segments the conductive line networks into distinct groups on different dies. This reduces the overall density of conductive lines within each die and minimizes parasitic capacitance and coupling effects that would occur in a single dense planar interconnect structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention distributes conductive lines across multiple vertical layers (different dies stacked together) rather than concentrating them in a single planar layer. This three-dimensional distribution of interconnects reduces line density and capacitive effects in any given cross-section.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS8872324B2Distributed semiconductor device methods, apparatus, and systems
Publication Date: 2014.10.28 MICRON TECHNOLOGY INC
  • US8872324B2 patent drawing
  • US8872324B2 patent drawing
  • US8872324B2 patent drawing

AI summary

Some embodiments include a device having a number of memory cells and associated circuitry for accessing the memory cells. The memory cells of the device may be formed in one or more memory cell dice. The associated circuitry of the device may also be formed in one or more dice, optionally separated from the memory cell dice.