Stacked Semiconductor Package with Through Structures for Heat Dissipation

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Solution Overview

Problem

Current semiconductor packages face challenges in achieving improved thermal characteristics and reliability, particularly in compact designs where heat management and electrical connectivity are critical for efficient operation.

Innovation Solution

A semiconductor package configuration is proposed, featuring stacked chips with specific through structures and conductive vias that allow for direct electrical connections and efficient heat dissipation, including a logic chip on top for enhanced thermal management and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If chips are stacked vertically to reduce package size, then compactness is improved, but heat dissipation becomes more difficult

Engineering Contradiction:
Improvepackage sizeVSAvoidheat dissipation
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The patent transitions from horizontal heat dissipation in traditional lateral packaging to vertical heat dissipation through the stacked chip structure. Heat sinks and thermal management components are positioned at the top and bottom surfaces of the stack, utilizing the vertical dimension to conduct heat away from the densely packed chips, thereby solving the heat dissipation challenge in compact packages.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The package is segmented into multiple functional layers with dedicated thermal management zones. Different chips in the stack can have different thermal characteristics, and the structure allows for separate thermal pathways through top and bottom heat sinks, enabling independent thermal control for different functional blocks within the compact volume.

Inventive Principle:
Principle #1Segmentation

2Reliability

If through structures are used to penetrate semiconductor substrates for electrical connection, then electrical connectivity is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveelectrical connectivityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Through structures are formed in the semiconductor substrates before chip stacking, allowing alignment and connection to be established in advance. This preliminary formation of through-holes or through-silicon vias enables subsequent bonding processes to be simpler and more reliable, as the electrical pathways are pre-configured rather than requiring complex post-assembly routing.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The through structures act as intermediary elements that bridge multiple chip layers. These conductive pathways penetrate the substrate and provide direct electrical connection between upper and lower chips, eliminating the need for complex wire bonding or trace routing through intermediate connection layers, thereby improving reliability while managing manufacturing complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If multiple dummy chips are stacked to achieve electrical connection routing, then device functionality is improved, but package volume increases

Engineering Contradiction:
Improveelectrical connection routingVSAvoidpackage volume
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The dummy chips are designed with multi-functionality, serving both as electrical connection intermediaries and as part of the overall package structure. Their substrates and conductive vias are configured to provide routing pathways while their physical presence contributes to the structural integrity and thermal management of the package, thereby achieving routing functionality without proportional volume increase.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The electrical connection pathways are nested within the dummy chip structures rather than requiring separate external routing layers. The conductive vias and traces are integrated into the dummy chip substrate thickness, allowing connection routing to be embedded within the existing package volume rather than adding external expansion.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentUS11482509B2Semiconductor package
Publication Date: 2022.10.25 SAMSUNG ELECTRONICS CO LTD
  • US11482509B2 patent drawing
  • US11482509B2 patent drawing
  • US11482509B2 patent drawing

AI summary

Disclosed is a semiconductor package comprising a first memory chip including a first semiconductor substrate and a first through structure that penetrates the first semiconductor substrate, a second memory chip that directly contacts a top surface of the first memory chip and includes a second semiconductor substrate and a second through structure that penetrates the second semiconductor substrate, a first dummy chip that directly contacts a top surface of the second memory chip and includes a first conductive via, a second dummy chip that directly contacts a top surface of the first dummy chip and includes a second conductive via, and a logic chip in direct contact with a top surface of the second dummy chip. The logic chip is electrically connected to the first through structure through the second conductive via, the first conductive via, and the second through structure.