Stacked Solar Cell and Sensor Structure for On-Chip Power Supply
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Solution Overview
Problem
As image sensors miniaturize, power supply becomes a critical consideration due to reduced size, necessitating efficient integration of power generation and storage within a compact form factor.
Innovation Solution
Integration of a solar cell with a sensing device, utilizing a semiconductor structure that includes a solar cell and a sensing device bonded together, where the solar cell generates power through photovoltaic effect and provides it to the sensing device, supplemented by energy storage components like MIM capacitors, and an inverter to stabilize voltage, enabling self-sufficiency and reducing external power requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If image sensors are miniaturized to fit into compact applications, then the form factor is reduced, but the power supply becomes insufficient and external power sources are required
Solution Approach 1:
The patent combines multiple functions (power generation, energy storage, voltage regulation, and sensing) into a single integrated semiconductor structure. The solar cell, MIM capacitor, inverter, and sensing device are merged into one compact unit, eliminating the need for external power sources while maintaining miniaturization.
Solution Approach 2:
The integrated semiconductor structure performs multiple functions simultaneously: the solar cell generates power, the MIM capacitor stores energy, the inverter regulates voltage, and the sensing device detects signals. This multi-functionality allows the compact structure to be self-sufficient without requiring separate external components.
2Use of energy by moving object
If external power sources are used to support miniaturized image sensors, then power supply is sufficient, but the overall device complexity and size increase
Solution Approach 1:
Instead of using separate external power sources, the patent merges power generation (solar cell), energy storage (MIM capacitor), and voltage regulation (inverter) functions into the sensing device itself. This integration reduces device complexity by eliminating external components while ensuring adequate power supply.
Solution Approach 2:
The sensing device becomes self-sufficient by generating its own power through the solar cell, storing energy in the MIM capacitor, and regulating voltage through the inverter. This self-service capability eliminates the need for external power sources and reduces overall device complexity.
3Quantity of substance
If energy storage components are added to the semiconductor structure, then energy storage capacity is enhanced, but the manufacturing process complexity increases
Solution Approach 1:
The MIM capacitor is formed by nesting multiple layers (first and second electrode layers with dielectric material between them) within the existing semiconductor structure. This nested configuration enhances energy storage capacity while utilizing the same manufacturing processes already employed for other device layers, minimizing additional process complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated semiconductor structure allows for a smaller form factor by independently providing power to the sensing device, enhancing energy storage capacity, and facilitating efficient power conversion, thus addressing power supply challenges in miniaturized image sensors.
Implementation Method 1
the solar cell generates power through photovoltaic effect
Data Source
AI summary
The present disclosure provides a semiconductor structure and a method of manufacturing the same. The semiconductor structure includes a sensing device, a solar cell, and an interconnecting structure. The solar cell is disposed above the sensing device and is electrically connected to the sensing device. The interconnecting structure is disposed between the sensing device and the solar cell and has a first surface facing the solar cell and a second surface facing the sensing devices. The interconnecting structure comprises a first energy storage component and a second energy storage component. The first energy storage component is disposed closer to the first surface of the interconnecting structure than the second energy storage component.


