Stacked Solar Cell and Sensor Structure for On-Chip Power Supply

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

As image sensors miniaturize, power supply becomes a critical consideration due to reduced size, necessitating efficient integration of power generation and storage within a compact form factor.

Innovation Solution

Integration of a solar cell with a sensing device, utilizing a semiconductor structure that includes a solar cell and a sensing device bonded together, where the solar cell generates power through photovoltaic effect and provides it to the sensing device, supplemented by energy storage components like MIM capacitors, and an inverter to stabilize voltage, enabling self-sufficiency and reducing external power requirements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If image sensors are miniaturized to fit into compact applications, then the form factor is reduced, but the power supply becomes insufficient and external power sources are required

Engineering Contradiction:
Improveform factorVSAvoidpower supply
Core Design Contradiction:
Volume of moving objectVSUse of energy by moving object

Solution Approach 1:

The patent combines multiple functions (power generation, energy storage, voltage regulation, and sensing) into a single integrated semiconductor structure. The solar cell, MIM capacitor, inverter, and sensing device are merged into one compact unit, eliminating the need for external power sources while maintaining miniaturization.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated semiconductor structure performs multiple functions simultaneously: the solar cell generates power, the MIM capacitor stores energy, the inverter regulates voltage, and the sensing device detects signals. This multi-functionality allows the compact structure to be self-sufficient without requiring separate external components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Use of energy by moving object

If external power sources are used to support miniaturized image sensors, then power supply is sufficient, but the overall device complexity and size increase

Engineering Contradiction:
Improvepower supplyVSAvoiddevice complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

Instead of using separate external power sources, the patent merges power generation (solar cell), energy storage (MIM capacitor), and voltage regulation (inverter) functions into the sensing device itself. This integration reduces device complexity by eliminating external components while ensuring adequate power supply.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sensing device becomes self-sufficient by generating its own power through the solar cell, storing energy in the MIM capacitor, and regulating voltage through the inverter. This self-service capability eliminates the need for external power sources and reduces overall device complexity.

Inventive Principle:
Principle #25Self-service

3Quantity of substance

If energy storage components are added to the semiconductor structure, then energy storage capacity is enhanced, but the manufacturing process complexity increases

Engineering Contradiction:
Improveenergy storage capacityVSAvoidmanufacturing process
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The MIM capacitor is formed by nesting multiple layers (first and second electrode layers with dielectric material between them) within the existing semiconductor structure. This nested configuration enhances energy storage capacity while utilizing the same manufacturing processes already employed for other device layers, minimizing additional process complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated semiconductor structure allows for a smaller form factor by independently providing power to the sensing device, enhancing energy storage capacity, and facilitating efficient power conversion, thus addressing power supply challenges in miniaturized image sensors.

Implementation Method 1

the solar cell generates power through photovoltaic effect

Methodology Applied
Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Data Source

PatentUS12471408B2Semiconductor structure and method of manufacturing the same
Publication Date: 2025.11.11 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12471408B2 patent drawing
  • US12471408B2 patent drawing
  • US12471408B2 patent drawing

AI summary

The present disclosure provides a semiconductor structure and a method of manufacturing the same. The semiconductor structure includes a sensing device, a solar cell, and an interconnecting structure. The solar cell is disposed above the sensing device and is electrically connected to the sensing device. The interconnecting structure is disposed between the sensing device and the solar cell and has a first surface facing the solar cell and a second surface facing the sensing devices. The interconnecting structure comprises a first energy storage component and a second energy storage component. The first energy storage component is disposed closer to the first surface of the interconnecting structure than the second energy storage component.